Piezoelectrically actuated linear resonators on ring-shaped suspensions for applications in MEMS phase-sensitive gyroscope

S. Gorelick, J. R. Dekker, B. Guo, H. Rimminen

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearch

3 Citations (Scopus)

Abstract

Excitation of linear resonators by means of thin aluminium nitride piezoelectric films processed on annular (ring-shaped) flexures was investigated. The in-plane resonance modes at 8-45 kHz frequencies with quality factors >104 were measured for both single (uni-directional) and double (bi-directional) in-plane degree of freedom devices in vacuum. Annular springs have different spring constants for different directions of deformation allowing efficient decoupling of orthogonal modes in bi-directional symmetric devices. The primary application of the bi-directional resonators is in orbiting-motion MEMS gyroscopes that rely on phase-shift detection induced by external angular rates. To investigate the feasibility of differential piezoactuation for generation of motion in uni- And bi-directional devices by means of thin piezoelectric films processed on supporting annular springs, MEMS resonators were modelled, designed, fabricated and electrically characterized.

Original languageEnglish
Title of host publicationProcedia Engineering
Subtitle of host publicationEurosensors 2014 Proceedings
EditorsGiorgio Sberveglieri, Vittorio Ferrari
PublisherElsevier
Pages1597-1600
Number of pages4
Volume87
DOIs
Publication statusPublished - 2014
Externally publishedYes
EventEuropean Conference on Solid-State Transducers (Eurosensors) 2014 - Brescia, Italy
Duration: 7 Sep 201410 Sep 2014
Conference number: 28th

Publication series

NameProcedia Engineering
PublisherElsevier
ISSN (Print)1877-7058

Conference

ConferenceEuropean Conference on Solid-State Transducers (Eurosensors) 2014
Abbreviated titleEUROSENSORS 2014
CountryItaly
CityBrescia
Period7/09/1410/09/14

Keywords

  • Aluminium nitride
  • Annular spring
  • Differential piezoactuation
  • Mems
  • Mems gyroscope
  • Piezoactuation
  • Ring-shaped spring

Cite this