Phase Evolution During the Nitridation of Silicon with a Clay Additive

S P P Swenser, Yibing B Cheng

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Key Engineering Materials
Place of Publication	Switzerland
Publisher	Trans.Tech. Pubs.
Pages	940 - 943
Number of pages	4
ISBN (Print)	1013-9826
Publication status	Published - 1997
Event	Key Engineering Materials - Versailles, Switzerland Duration: 1 Jan 1997 → …

Cite this

@inproceedings{93cf70e76df7407480d8f3531301b5a5,

title = "Phase Evolution During the Nitridation of Silicon with a Clay Additive",

author = "Swenser, {S P P} and Cheng, {Yibing B}",

year = "1997",

language = "English",

isbn = "1013-9826",

pages = "940 -- 943",

booktitle = "Key Engineering Materials",

publisher = "Trans.Tech. Pubs.",

note = "Key Engineering Materials ; Conference date: 01-01-1997",

}