Phase Evolution During the Nitridation of Silicon with a Clay Additive

S P P Swenser, Yibing B Cheng

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Original languageEnglish
Title of host publicationKey Engineering Materials
Place of PublicationSwitzerland
PublisherTrans.Tech. Pubs.
Pages940 - 943
Number of pages4
ISBN (Print)1013-9826
Publication statusPublished - 1997
EventKey Engineering Materials - Versailles, Switzerland
Duration: 1 Jan 1997 → …


ConferenceKey Engineering Materials
Period1/01/97 → …

Cite this