Pattern planning and optimization of charged particle beam scanning in naomanufacturing

Ruwen Qin, Jing Fu, Zhaozheng Yin

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Original languageEnglish
Title of host publication15th International Conference on Mechatronics Technology
EditorsBijan Shirinzadeh, Yoshimi Takeuchi
Place of PublicationMelbourne Vic Australia
PublisherMonash University Publishing
Pages454 - 460
Number of pages7
ISBN (Print)9780732640187
Publication statusPublished - 2011
EventInternational Conference on Mechatronics Technology 2011 - Melbourne, Australia
Duration: 30 Nov 20112 Dec 2011
Conference number: 15th

Conference

ConferenceInternational Conference on Mechatronics Technology 2011
Country/TerritoryAustralia
CityMelbourne
Period30/11/112/12/11

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