Outlier distribution detection approach to semiconductor wafer fabrication process monitoring,

Huiyuan Cheng, Melanie Po-Leen Ooi, Ye Chow Kuang, Serge Demidenko, Bryan Cheah

    Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the Third Asia Symposium on Quality Electronic Design, ASQED 2011
    EditorsVolkan Kursun
    Place of PublicationUSA
    PublisherIEEE, Institute of Electrical and Electronics Engineers
    Pages62 - 67
    Number of pages6
    ISBN (Print)9781457701443
    DOIs
    Publication statusPublished - 2011
    EventAsia Symposium on Quality Electronic Design (ASQED) - Malaysia, USA
    Duration: 1 Jan 2011 → …

    Conference

    ConferenceAsia Symposium on Quality Electronic Design (ASQED)
    CityUSA
    Period1/01/11 → …

    Cite this

    Cheng, H., Ooi, M. P-L., Kuang, Y. C., Demidenko, S., & Cheah, B. (2011). Outlier distribution detection approach to semiconductor wafer fabrication process monitoring, In V. Kursun (Ed.), Proceedings of the Third Asia Symposium on Quality Electronic Design, ASQED 2011 (pp. 62 - 67). USA: IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/ASQED.2011.6111703
    Cheng, Huiyuan ; Ooi, Melanie Po-Leen ; Kuang, Ye Chow ; Demidenko, Serge ; Cheah, Bryan. / Outlier distribution detection approach to semiconductor wafer fabrication process monitoring,. Proceedings of the Third Asia Symposium on Quality Electronic Design, ASQED 2011. editor / Volkan Kursun. USA : IEEE, Institute of Electrical and Electronics Engineers, 2011. pp. 62 - 67
    @inproceedings{92b3314d7f964bb88c55881a78a4bc7a,
    title = "Outlier distribution detection approach to semiconductor wafer fabrication process monitoring,",
    author = "Huiyuan Cheng and Ooi, {Melanie Po-Leen} and Kuang, {Ye Chow} and Serge Demidenko and Bryan Cheah",
    year = "2011",
    doi = "10.1109/ASQED.2011.6111703",
    language = "English",
    isbn = "9781457701443",
    pages = "62 -- 67",
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    booktitle = "Proceedings of the Third Asia Symposium on Quality Electronic Design, ASQED 2011",
    publisher = "IEEE, Institute of Electrical and Electronics Engineers",
    address = "United States of America",

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    Cheng, H, Ooi, MP-L, Kuang, YC, Demidenko, S & Cheah, B 2011, Outlier distribution detection approach to semiconductor wafer fabrication process monitoring, in V Kursun (ed.), Proceedings of the Third Asia Symposium on Quality Electronic Design, ASQED 2011. IEEE, Institute of Electrical and Electronics Engineers, USA, pp. 62 - 67, Asia Symposium on Quality Electronic Design (ASQED), USA, 1/01/11. https://doi.org/10.1109/ASQED.2011.6111703

    Outlier distribution detection approach to semiconductor wafer fabrication process monitoring, / Cheng, Huiyuan; Ooi, Melanie Po-Leen; Kuang, Ye Chow; Demidenko, Serge; Cheah, Bryan.

    Proceedings of the Third Asia Symposium on Quality Electronic Design, ASQED 2011. ed. / Volkan Kursun. USA : IEEE, Institute of Electrical and Electronics Engineers, 2011. p. 62 - 67.

    Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

    TY - GEN

    T1 - Outlier distribution detection approach to semiconductor wafer fabrication process monitoring,

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    AU - Ooi, Melanie Po-Leen

    AU - Kuang, Ye Chow

    AU - Demidenko, Serge

    AU - Cheah, Bryan

    PY - 2011

    Y1 - 2011

    UR - http://www.asqed.com/English/Archives/2011/Technical_Sessions/87.html

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    DO - 10.1109/ASQED.2011.6111703

    M3 - Conference Paper

    SN - 9781457701443

    SP - 62

    EP - 67

    BT - Proceedings of the Third Asia Symposium on Quality Electronic Design, ASQED 2011

    A2 - Kursun, Volkan

    PB - IEEE, Institute of Electrical and Electronics Engineers

    CY - USA

    ER -

    Cheng H, Ooi MP-L, Kuang YC, Demidenko S, Cheah B. Outlier distribution detection approach to semiconductor wafer fabrication process monitoring, In Kursun V, editor, Proceedings of the Third Asia Symposium on Quality Electronic Design, ASQED 2011. USA: IEEE, Institute of Electrical and Electronics Engineers. 2011. p. 62 - 67 https://doi.org/10.1109/ASQED.2011.6111703