Outlier distribution detection approach to semiconductor wafer fabrication process monitoring,

Huiyuan Cheng, Melanie Po-Leen Ooi, Ye Chow Kuang, Serge Demidenko, Bryan Cheah

    Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the Third Asia Symposium on Quality Electronic Design, ASQED 2011
    EditorsVolkan Kursun
    Place of PublicationUSA
    PublisherIEEE, Institute of Electrical and Electronics Engineers
    Pages62 - 67
    Number of pages6
    ISBN (Print)9781457701443
    DOIs
    Publication statusPublished - 2011
    EventAsia Symposium on Quality Electronic Design (ASQED) - Malaysia, USA
    Duration: 1 Jan 2011 → …

    Conference

    ConferenceAsia Symposium on Quality Electronic Design (ASQED)
    CityUSA
    Period1/01/11 → …

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