Optimization based geometric modeling of nano/micro scale ion milling of organic materials

Jing Fu, Sanjay B. Joshi

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Abstract

Recently, Focused Ion Beam (FIB) instruments have begun be applied to organic materials such as polymers and biological systems. This provides a novel tool for sectioning biological samples for analysis, or microfabrication with environment friendly materials. The modeling of nano/micro scale geometry accurately sculptured by FIB milling is crucial for generating the milling plan and process control, and for computer simulation for prediction and visualization of the milled geometry. However, modeling of the ion milling process on compound materials, especially for high aspect ratio feature, is still difficult due to the complexity of target material, as well as multiple physical and chemical interactions involved. In this study, a comprehensive model of ion milling with organic targets is presented to address the challenges using a simulation based approach. This platform has also been validated by milling different features on water ice in a cryogenic environment, and the simulation and experiment results show great consistency. With the proliferation of nanotechnology to biomedical and biomaterial domains, the proposed approach is expected to be a flexible tool for various applications involving novel and heterogeneous milling targets.

Original languageEnglish
Title of host publicationASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009
Pages401-408
Number of pages8
Volume6
DOIs
Publication statusPublished - 2009
Externally publishedYes
EventASME International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE) 2009 - San Diego, United States of America
Duration: 30 Aug 20092 Sept 2009

Conference

ConferenceASME International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE) 2009
Country/TerritoryUnited States of America
CitySan Diego
Period30/08/092/09/09

Keywords

  • Focused Ion Beam (FIB)
  • Optimization
  • Organic material
  • Simulation

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