Optical evaluation of ingot fixity in semiconductor wafer slicing

Tuck Wah Ng, R Nallathamby

Research output: Contribution to journalArticleResearchpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)641 - 645
Number of pages5
JournalOptics and Laser Technology
Volume36
Issue number8
DOIs
Publication statusPublished - 2004

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