Nanoscale displacement sensing using microfabricated variable-inductance planar coils

Mustafa Bulut Coskun, Kasun Maduranga Silva Thotahewa, York-Sing Ying, Mehmet Yuce, Adrian Neild, Tuncay Alan

Research output: Contribution to journalArticleResearchpeer-review

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)1 - 4
Number of pages4
JournalApplied Physics Letters
Volume103
Issue number14
DOIs
Publication statusPublished - 2013

Cite this