Nano positioning of a high power ultrasonic linear motor

Wan-Soo Kim, Cheol-Ho Yun, Sun-Kyu Lee

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	5687 - 5692
Number of pages	6
Journal	Japanese Journal of Applied Physics
Volume	47
Issue number	7
Publication status	Published - 2008
Externally published	Yes

Cite this

@article{8e90c102f6d34c2ebda84460ff3e4221,

title = "Nano positioning of a high power ultrasonic linear motor",

author = "Wan-Soo Kim and Cheol-Ho Yun and Sun-Kyu Lee",

year = "2008",

language = "English",

volume = "47",

pages = "5687 -- 5692",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "7",

}