Nano positioning of a high power ultrasonic linear motor

Wan-Soo Kim, Cheol-Ho Yun, Sun-Kyu Lee

Research output: Contribution to journalArticleResearchpeer-review

30 Citations (Scopus)
Original languageEnglish
Pages (from-to)5687 - 5692
Number of pages6
JournalJapanese Journal of Applied Physics
Volume47
Issue number7
Publication statusPublished - 2008
Externally publishedYes

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