Multiple wavelength InGaAs quantum dot lasers using ion implantation induced intermixing

S. Mokkapati, Sichao Du, M. Buda, L. Fu, H. H. Tan, C. Jagadish

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Abstract

We demonstrate multiple wavelength InGaAs quantum dot lasers using ion implantation induced intermixing. Proton implantation, followed by annealing is used to create differential interdiffusion in the active region of the devices. The characteristics (lasing-spectra, threshold currents and slope efficiencies) of the multi-wavelength devices are compared to those of as-grown devices and the differences are explained in terms of altered energy level spacing in the annealed quantum dots.

Original languageEnglish
Pages (from-to)550-553
Number of pages4
JournalNanoscale Research Letters
Volume2
Issue number11
DOIs
Publication statusPublished - 1 Nov 2007
Externally publishedYes

Keywords

  • Ion implantation
  • Quantum dot lasers

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