Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field

Felix Beyeler, Adrian Neild, Stefano Oberti, Dominik J Bell, Yu Sun, Jurg Dual, Bradley J Nelson

Research output: Contribution to journalArticleResearchpeer-review

298 Citations (Scopus)
Original languageEnglish
Pages (from-to)7 - 15
Number of pages9
JournalJournal of Microelectromechanical Systems
Volume16
Issue number1
Publication statusPublished - 2007

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