Modeling of two-plate capacitive position sensing systems for high precision planar three DOF measurement

Leon Clark, Bijan Shirinzadeh

Mechanical & Aerospace Engineering

Research output: Contribution to journal › Article › Research › peer-review

7 Citations (Scopus)

1 results
- Title(descending)

Melbourne Centre for Nanofabrication
Sean Langelier (Manager)
Office of the Vice-Provost (Research and Research Infrastructure)
Facility/equipment: Facility