Abstract
This paper investigates the issues associated with the use of two-plate capacitive sensors for the measurement of coupled linear and angular motions, particularly those of three planar degrees of freedom (DOF) micro/nano positioners. Commonly, such sensors are employed for the measurement of linear motions, and angular motion could introduce non-linearities in the capacitance response. An analytic model of a general three sensor system is developed, together with its linearization, which transform the position and orientation (pose) of the end effector of a planar positioner to the capacitance of each sensor. The sensitivities of pose estimations to capacitance non-linearity and parameter variation are analyzed, which further leads to the identification of optimized sensor positioning strategies. The response of a single sensor to tilt is investigated, and experimentation is performed to determine the magnitude of non-linear effects, and its subsequent impact on the three DOF position estimation.
| Original language | English |
|---|---|
| Pages (from-to) | 383-392 |
| Number of pages | 10 |
| Journal | Precision Engineering |
| Volume | 46 |
| DOIs | |
| Publication status | Published - 1 Oct 2016 |
Keywords
- Capacitive sensors
- Coupled 3DOF motion
- Micro-nano positioning
- Non-linearity
- Sensor location
Cite this
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Modeling of two-plate capacitive position sensing systems for high precision planar three DOF measurement. / Clark, Leon; Shirinzadeh, Bijan.
In: Precision Engineering, Vol. 46, 01.10.2016, p. 383-392.Research output: Contribution to journal › Article › Research › peer-review
TY - JOUR
T1 - Modeling of two-plate capacitive position sensing systems for high precision planar three DOF measurement
AU - Clark, Leon
AU - Shirinzadeh, Bijan
PY - 2016/10/1
Y1 - 2016/10/1
N2 - This paper investigates the issues associated with the use of two-plate capacitive sensors for the measurement of coupled linear and angular motions, particularly those of three planar degrees of freedom (DOF) micro/nano positioners. Commonly, such sensors are employed for the measurement of linear motions, and angular motion could introduce non-linearities in the capacitance response. An analytic model of a general three sensor system is developed, together with its linearization, which transform the position and orientation (pose) of the end effector of a planar positioner to the capacitance of each sensor. The sensitivities of pose estimations to capacitance non-linearity and parameter variation are analyzed, which further leads to the identification of optimized sensor positioning strategies. The response of a single sensor to tilt is investigated, and experimentation is performed to determine the magnitude of non-linear effects, and its subsequent impact on the three DOF position estimation.
AB - This paper investigates the issues associated with the use of two-plate capacitive sensors for the measurement of coupled linear and angular motions, particularly those of three planar degrees of freedom (DOF) micro/nano positioners. Commonly, such sensors are employed for the measurement of linear motions, and angular motion could introduce non-linearities in the capacitance response. An analytic model of a general three sensor system is developed, together with its linearization, which transform the position and orientation (pose) of the end effector of a planar positioner to the capacitance of each sensor. The sensitivities of pose estimations to capacitance non-linearity and parameter variation are analyzed, which further leads to the identification of optimized sensor positioning strategies. The response of a single sensor to tilt is investigated, and experimentation is performed to determine the magnitude of non-linear effects, and its subsequent impact on the three DOF position estimation.
KW - Capacitive sensors
KW - Coupled 3DOF motion
KW - Micro-nano positioning
KW - Non-linearity
KW - Sensor location
UR - http://www.scopus.com/inward/record.url?scp=84977604872&partnerID=8YFLogxK
U2 - 10.1016/j.precisioneng.2016.06.008
DO - 10.1016/j.precisioneng.2016.06.008
M3 - Article
VL - 46
SP - 383
EP - 392
JO - Precision Engineering
JF - Precision Engineering
SN - 0141-6359
ER -