Abstract
This paper investigates the issues associated with the use of two-plate capacitive sensors for the measurement of coupled linear and angular motions, particularly those of three planar degrees of freedom (DOF) micro/nano positioners. Commonly, such sensors are employed for the measurement of linear motions, and angular motion could introduce non-linearities in the capacitance response. An analytic model of a general three sensor system is developed, together with its linearization, which transform the position and orientation (pose) of the end effector of a planar positioner to the capacitance of each sensor. The sensitivities of pose estimations to capacitance non-linearity and parameter variation are analyzed, which further leads to the identification of optimized sensor positioning strategies. The response of a single sensor to tilt is investigated, and experimentation is performed to determine the magnitude of non-linear effects, and its subsequent impact on the three DOF position estimation.
Original language | English |
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Pages (from-to) | 383-392 |
Number of pages | 10 |
Journal | Precision Engineering |
Volume | 46 |
DOIs | |
Publication status | Published - 1 Oct 2016 |
Keywords
- Capacitive sensors
- Coupled 3DOF motion
- Micro-nano positioning
- Non-linearity
- Sensor location
Equipment
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Melbourne Centre for Nanofabrication
Sean Langelier (Manager)
Office of the Vice-Provost (Research and Research Infrastructure)Facility/equipment: Facility