Abstract
In the process of growing crystal, the crystal diameter was controlled through adjusting the crystal lift rate and the heater temperature. Therefore, the crystal diameter control system is a multiple input multiple output system. Two input variables are the heater temperature and the crystal lift rate respectively. Two output variables are the crystal diameter and the crystal growing rate respectively. The inputs and outputs are mutally coupling. The feedfarward compensation decoupling method is proposed for decoupling control of the crystal growth control system. Simulation result and the corresponding experiment result show the effectiveness of the method.
| Original language | English |
|---|---|
| Pages (from-to) | 1353-1357 |
| Number of pages | 5 |
| Journal | Rengong Jingti Xuebao/Journal of Synthetic Crystals |
| Volume | 40 |
| Issue number | 5 |
| Publication status | Published - Oct 2011 |
| Externally published | Yes |
Keywords
- Decoupling control
- Dual input dual output system
- Feedforward compensation
- Single crystal furnace