Modeling of aluminum via filling by forcefill

Yuri Estrin; Hyoung Seop Kim; Mark Kovler; G Berler; Roi Shaviv; Eugen Rabkin

Modeling of aluminum via filling by forcefill

Yuri Estrin, Hyoung Seop Kim, Mark Kovler, G Berler, Roi Shaviv, Eugen Rabkin

Materials Science & Engineering

Research output: Contribution to journal › Article › Research › peer-review

12 Citations (Scopus)

Abstract

DOI: 10.1063/1.1565512

Original language	English
Pages (from-to)	5812 - 5815
Number of pages	4
Journal	Journal of Applied Physics
Volume	93
Issue number	9
Publication status	Published - 2003

Cite this

@article{56ddf9615bae46f2b1aee5c4ca6b0d69,

title = "Modeling of aluminum via filling by forcefill",

abstract = "DOI: 10.1063/1.1565512",

author = "Yuri Estrin and Kim, \{Hyoung Seop\} and Mark Kovler and G Berler and Roi Shaviv and Eugen Rabkin",

year = "2003",

language = "English",

volume = "93",

pages = "5812 -- 5815",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "9",

}

TY - JOUR

T1 - Modeling of aluminum via filling by forcefill

AU - Estrin, Yuri

AU - Kim, Hyoung Seop

AU - Kovler, Mark

AU - Berler, G

AU - Shaviv, Roi

AU - Rabkin, Eugen

PY - 2003

Y1 - 2003

N2 - DOI: 10.1063/1.1565512

AB - DOI: 10.1063/1.1565512

UR - http://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JAPIAU000093000009005812000001&idtype=cvips

UR - https://www.scopus.com/pages/publications/0038297295

M3 - Article

SN - 0021-8979

VL - 93

SP - 5812

EP - 5815

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 9

ER -

Modeling of aluminum via filling by forcefill

Abstract

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