Modeling of aluminum via filling by forcefill

Yuri Estrin, Hyoung Seop Kim, Mark Kovler, G Berler, Roi Shaviv, Eugen Rabkin

Research output: Contribution to journalArticleResearchpeer-review

10 Citations (Scopus)

Abstract

DOI: 10.1063/1.1565512
Original languageEnglish
Pages (from-to)5812 - 5815
Number of pages4
JournalJournal of Applied Physics
Volume93
Issue number9
Publication statusPublished - 2003

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