Modeling and tracking control of a novel XYθz stage

Kunhai Cai, Yanling Tian, Fujun Wang, Dawei Zhang, Xianping Liu, Bijan Shirinzadeh

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12 Citations (Scopus)


A XYθz stage is designed and experimentally tested. This developed stage is driven by three piezoelectric actuators (PZTs) and guided by a flexure hinge based mechanism with three symmetric T-shape hinges. It was manufactured monolithically by using wire electrical discharge machining technology. In addition, considering the both electrical and mechanical characteristics, a third-order dynamic model of the 3-DOF system has been established to investigate the relationship between the input voltage and the output displacement of the entire system. The parameters of the third-order dynamic model were estimated by using the system identification toolbox. Furthermore, decoupling control is also proposed to solve the existed coupling motion of the stage. In order to compensate the hysteresis of PZT, the inverse Bouc-Wen model was utilized as a feedforward hysteresis compensator. Finally, extensive experiments were performed to verify the good decoupling and tracking performances of the developed stage.

Original languageEnglish
Pages (from-to)3575-3588
Number of pages14
JournalMicrosystem Technologies
Issue number8
Publication statusPublished - 1 Aug 2017

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