Modeling and controller design of a 6-DOF precision positioning system

Kunhai Cai, Yanling Tian, Xianping Liu, Sergej Fatikow, Fujun Wang, Liangyu Cui, Dawei Zhang, Bijan Shirinzadeh

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83 Citations (Scopus)


A key hurdle to meet the needs of micro/nano manipulation in some complex cases is the inadequate workspace and flexibility of the operation ends. This paper presents a 6-degree of freedom (DOF) serial-parallel precision positioning system, which consists of two compact type 3-DOF parallel mechanisms. Each parallel mechanism is driven by three piezoelectric actuators (PEAs), guided by three symmetric T-shape hinges and three elliptical flexible hinges, respectively. It can extend workspace and improve flexibility of the operation ends. The proposed system can be assembled easily, which will greatly reduce the assembly errors and improve the positioning accuracy. In addition, the kinematic and dynamic model of the 6-DOF system are established, respectively. Furthermore, in order to reduce the tracking error and improve the positioning accuracy, the Discrete-time Model Predictive Controller (DMPC) is applied as an effective control method. Meanwhile, the effectiveness of the DMCP control method is verified. Finally, the tracking experiment is performed to verify the tracking performances of the 6-DOF stage.

Original languageEnglish
Pages (from-to)536-555
Number of pages20
JournalMechanical Systems and Signal Processing
Publication statusPublished - 1 May 2018


  • 6-DOF precision positioning system
  • Model predictive controller
  • Modeling
  • Tracking control

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