Model-independent determination of crystal-lattice strains in epitaxially grown layers in the case of incomplete experimental data

A numerical technique for an X‐ray phase retrieval in the case of incomplete experimental data is considered. Replacement of plus/minus infinity limits in a mathematical formalism of the reconstruction procedure by actually measured experimental values of the scattering vector in practice affects the resulting profile of the complex crystal structure factor. A physically sensible analysis of a priori knowledge of the sample structure together with prominent features of experimentally observed intensity profiles allows one to obtain an unambiguous and reliable solution for the inversion procedure. The limitations of the phase‐reconstruction technique applicable to truncated experimental data are discussed.