Microfabrication of surface acoustic wave device using UV LED photolithography technique

Yih Bing Chu, Ajay Achath Mohanan, Tridib Saha, Nagasundara Ramanan Ramakrishnan, Rajendran Parthiban, Ramakrishnan Narayanan

    Research output: Contribution to journalArticleResearchpeer-review

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)9 - 12
    Number of pages4
    JournalMicroelectronic Engineering
    Volume122
    DOIs
    Publication statusPublished - 2014

    Cite this

    Chu, Y. B., Achath Mohanan, A., Saha, T., Ramakrishnan, N. R., Parthiban, R., & Narayanan, R. (2014). Microfabrication of surface acoustic wave device using UV LED photolithography technique. Microelectronic Engineering, 122, 9 - 12. https://doi.org/10.1016/j.mee.2014.03.011