Microfabrication of surface acoustic wave device using UV LED photolithography technique

Yih Bing Chu; Ajay Achath Mohanan; Tridib Saha; Nagasundara Ramanan Ramakrishnan; Rajendran Parthiban; Ramakrishnan Narayanan

doi:10.1016/j.mee.2014.03.011

Microfabrication of surface acoustic wave device using UV LED photolithography technique

Yih Bing Chu, Ajay Achath Mohanan, Tridib Saha, Nagasundara Ramanan Ramakrishnan, Rajendran Parthiban, Ramakrishnan Narayanan

Malaysia Sch of Engineering

Research output: Contribution to journal › Article › Research › peer-review

20 Citations (Scopus)

Original language	English
Pages (from-to)	9 - 12
Number of pages	4
Journal	Microelectronic Engineering
Volume	122
DOIs	https://doi.org/10.1016/j.mee.2014.03.011
Publication status	Published - 2014

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10.1016/j.mee.2014.03.011

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@article{b4dc92af60c742adbd8199d2bfab2744,

title = "Microfabrication of surface acoustic wave device using UV LED photolithography technique",

author = "Chu, {Yih Bing} and {Achath Mohanan}, Ajay and Tridib Saha and Ramakrishnan, {Nagasundara Ramanan} and Rajendran Parthiban and Ramakrishnan Narayanan",

year = "2014",

doi = "10.1016/j.mee.2014.03.011",

language = "English",

volume = "122",

pages = "9 -- 12",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Microfabrication of surface acoustic wave device using UV LED photolithography technique

AU - Chu, Yih Bing

AU - Achath Mohanan, Ajay

AU - Saha, Tridib

AU - Ramakrishnan, Nagasundara Ramanan

AU - Parthiban, Rajendran

AU - Narayanan, Ramakrishnan

PY - 2014

Y1 - 2014

UR - http://www.sciencedirect.com/science/article/pii/S0167931714000847/pdfft?md5=d6dec6bce3bf9d7e02b2e93db01d0957&pid=1-s2.0-S0167931714000847-main.pdf

U2 - 10.1016/j.mee.2014.03.011

DO - 10.1016/j.mee.2014.03.011

M3 - Article

SN - 0167-9317

VL - 122

SP - 9

EP - 12

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Microfabrication of surface acoustic wave device using UV LED photolithography technique

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