Method to measure spatial coherence of subangstrom electron beams

Christian Dwyer, Rolf Erni, Joanne Etheridge

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Abstract

A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope(STEM) fitted with an objective lens aberration corrector. The method is applied to a Cs-corrected 300kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72Å FWHM using a probe-forming aperture of 25mrad and including the measured residual lens aberrations.
Original languageEnglish
Pages (from-to)1 - 3
Number of pages3
JournalApplied Physics Letters
Volume93
Issue number(Article no. 021115)
Publication statusPublished - 2008

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