Method to measure spatial coherence of subangstrom electron beams

Christian Dwyer; Rolf Erni; Joanne Etheridge

doi:10.1063/1.2957648

Method to measure spatial coherence of subangstrom electron beams

Christian Dwyer, Rolf Erni, Joanne Etheridge

Materials Science & Engineering

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Abstract

A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope(STEM) fitted with an objective lens aberration corrector. The method is applied to a C_s-corrected 300kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72Å FWHM using a probe-forming aperture of 25mrad and including the measured residual lens aberrations.

Original language	English
Article number	021115
Number of pages	3
Journal	Applied Physics Letters
Volume	93
Issue number	2
DOIs	https://doi.org/10.1063/1.2957648
Publication status	Published - 2008

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10.1063/1.2957648

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@article{4cbcacab0ad342da85dbce1baac0962b,

title = "Method to measure spatial coherence of subangstrom electron beams",

abstract = "A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope(STEM) fitted with an objective lens aberration corrector. The method is applied to a Cs-corrected 300kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56{\AA} full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72{\AA} FWHM using a probe-forming aperture of 25mrad and including the measured residual lens aberrations.",

author = "Christian Dwyer and Rolf Erni and Joanne Etheridge",

year = "2008",

doi = "10.1063/1.2957648",

language = "English",

volume = "93",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "2",

}

TY - JOUR

T1 - Method to measure spatial coherence of subangstrom electron beams

AU - Dwyer, Christian

AU - Erni, Rolf

AU - Etheridge, Joanne

PY - 2008

Y1 - 2008

N2 - A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope(STEM) fitted with an objective lens aberration corrector. The method is applied to a Cs-corrected 300kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72Å FWHM using a probe-forming aperture of 25mrad and including the measured residual lens aberrations.

AB - A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope(STEM) fitted with an objective lens aberration corrector. The method is applied to a Cs-corrected 300kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72Å FWHM using a probe-forming aperture of 25mrad and including the measured residual lens aberrations.

U2 - 10.1063/1.2957648

DO - 10.1063/1.2957648

M3 - Article

SN - 0003-6951

VL - 93

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 2

M1 - 021115

ER -

Method to measure spatial coherence of subangstrom electron beams

Abstract

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