Method to measure spatial coherence of subangstrom electron beams

Christian Dwyer, Rolf Erni, Joanne Etheridge

Research output: Contribution to journalArticleResearchpeer-review

Abstract

A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope(STEM) fitted with an objective lens aberration corrector. The method is applied to a Cs-corrected 300kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72Å FWHM using a probe-forming aperture of 25mrad and including the measured residual lens aberrations.
Original languageEnglish
Pages (from-to)1 - 3
Number of pages3
JournalApplied Physics Letters
Volume93
Issue number(Article no. 021115)
Publication statusPublished - 2008

Cite this

Dwyer, Christian ; Erni, Rolf ; Etheridge, Joanne. / Method to measure spatial coherence of subangstrom electron beams. In: Applied Physics Letters. 2008 ; Vol. 93, No. (Article no. 021115). pp. 1 - 3.
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Dwyer, C, Erni, R & Etheridge, J 2008, 'Method to measure spatial coherence of subangstrom electron beams', Applied Physics Letters, vol. 93, no. (Article no. 021115), pp. 1 - 3.

Method to measure spatial coherence of subangstrom electron beams. / Dwyer, Christian; Erni, Rolf; Etheridge, Joanne.

In: Applied Physics Letters, Vol. 93, No. (Article no. 021115), 2008, p. 1 - 3.

Research output: Contribution to journalArticleResearchpeer-review

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AU - Dwyer, Christian

AU - Erni, Rolf

AU - Etheridge, Joanne

PY - 2008

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AB - A method is described for measuring the intensity distribution of the electron source in a scanning transmission electron microscope(STEM) fitted with an objective lens aberration corrector. The method is applied to a Cs-corrected 300kV field emission gun TEM/STEM, which is found to have an effective source size of 0.56Å full width at half maximum (FWHM) under optical conditions suitable for high resolution STEM imaging. This corresponds to a probe intensity distribution at the specimen plane of 0.72Å FWHM using a probe-forming aperture of 25mrad and including the measured residual lens aberrations.

M3 - Article

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SP - 1

EP - 3

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

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