TY - JOUR
T1 - Metasurface-integrated vertical cavity surface-emitting lasers for programmable directional lasing emissions
AU - Xie, Yi Yang
AU - Ni, Pei Nan
AU - Wang, Qiu Hua
AU - Kan, Qiang
AU - Briere, Gauthier
AU - Chen, Pei Pei
AU - Zhao, Zhuang Zhuang
AU - Delga, Alexandre
AU - Ren, Hao-Ran
AU - Chen, Hong Da
AU - Xu, Chen
AU - Genevet, Patrice
N1 - Funding Information:
We acknowledge financial support from the National Key R&D Programme of China (grant no. 2018YFA0209000), the National Natural Science Foundation of China (grant nos. 61604007 and 61874145) and the Beijing Natural Science Foundation (grant nos. 4172009 and 4182012). P.-N.N., G.B. and P.G. acknowledge financial support from the European Research Council (ERC) under the European Union’s Horizon 2020 research and innovation programme (grant agreement FLATLIGHT no. 639109 and grant agreement i-LiDAR no. 874986). We acknowledge the Nanofabrication Laboratory at National Centre for Nanoscience and Technology for sample fabrication. We thank Y.B. Gao, Y.H. Zhang and Z.H. Zhang for fruitful discussions.
Publisher Copyright:
© 2020, The Author(s), under exclusive licence to Springer Nature Limited.
PY - 2020/2
Y1 - 2020/2
N2 - Vertical cavity surface-emitting lasers (VCSELs) have made indispensable contributions to the development of modern optoelectronic technologies. However, arbitrary beam shaping of VCSELs within a compact system has remained inaccessible until now. The emerging ultra-thin flat optical structures, namely metasurfaces, offer a powerful technique to manipulate electromagnetic fields with subwavelength spatial resolution. Here, we show that the monolithic integration of dielectric metasurfaces with VCSELs enables remarkable arbitrary control of the laser beam profiles, including self-collimation, Bessel and Vortex lasers, with high efficiency. Such wafer-level integration of metasurface through VCSEL-compatible technology simplifies the assembling process and preserves the high performance of the VCSELs. We envision that our approach can be implemented in various wide-field applications, such as optical fibre communications, laser printing, smartphones, optical sensing, face recognition, directional displays and ultra-compact light detection and ranging (LiDAR).
AB - Vertical cavity surface-emitting lasers (VCSELs) have made indispensable contributions to the development of modern optoelectronic technologies. However, arbitrary beam shaping of VCSELs within a compact system has remained inaccessible until now. The emerging ultra-thin flat optical structures, namely metasurfaces, offer a powerful technique to manipulate electromagnetic fields with subwavelength spatial resolution. Here, we show that the monolithic integration of dielectric metasurfaces with VCSELs enables remarkable arbitrary control of the laser beam profiles, including self-collimation, Bessel and Vortex lasers, with high efficiency. Such wafer-level integration of metasurface through VCSEL-compatible technology simplifies the assembling process and preserves the high performance of the VCSELs. We envision that our approach can be implemented in various wide-field applications, such as optical fibre communications, laser printing, smartphones, optical sensing, face recognition, directional displays and ultra-compact light detection and ranging (LiDAR).
UR - http://www.scopus.com/inward/record.url?scp=85077868389&partnerID=8YFLogxK
U2 - 10.1038/s41565-019-0611-y
DO - 10.1038/s41565-019-0611-y
M3 - Article
C2 - 31932760
AN - SCOPUS:85077868389
VL - 15
SP - 125
EP - 130
JO - Nature Nanotechnology
JF - Nature Nanotechnology
SN - 1748-3387
IS - 2
ER -