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Mechanically tuneable microoptical structure based on PDMS

  • V. J. Cadarso
  • , A. Llobera
  • , G. Villanueva
  • , J. A. Plaza
  • , J. Brugger
  • , C. Dominguez

Research output: Chapter in Book/Report/Conference proceedingConference PaperOther

Abstract

A PDMS based tuneable microoptical system fabricated merging deep reactive ion etching, SU-8 and soft lithography, with a low-cost (mass-production), simple and highly repetitive technology, is presented. This system consists on a structure of two microlenses with uncoupled optical properties that can be mechanically actuated. This device was numerically simulated prior to its fabrication, to optimize its design and improve its behaviour. In addition, an optical characterization of the fabricated devices was carried out to provide a proof of concept of the presented devices and validate the proposed fabrication technology.

Original languageEnglish
Title of host publicationProceedings of the Eurosensors XXIII Conference
EditorsJuergen Brugger, Danick Briand
Place of PublicationNetherlands
PublisherElsevier
Pages560-563
Number of pages4
DOIs
Publication statusPublished - Sept 2009
Externally publishedYes
EventEuropean Conference on Solid-State Transducers (Eurosensors) 2009 - Palais de Beaulieu and EPFL, Lausanne, Switzerland
Duration: 6 Sept 20099 Sept 2009

Publication series

NameProcedia Chemistry
PublisherElsevier
Number1
Volume1
ISSN (Print)1876-6196

Conference

ConferenceEuropean Conference on Solid-State Transducers (Eurosensors) 2009
Abbreviated titleEurosensors 2009
Country/TerritorySwitzerland
CityLausanne
Period6/09/099/09/09

Keywords

  • Microlenses
  • PDMS
  • tuneable focus

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