Measurement of chromatic aberration in STEM and SCEM by coherent convergent beam electron diffraction

Changlin Zheng, Joanne Etheridge

Research output: Contribution to journalArticleResearchpeer-review

4 Citations (Scopus)

Abstract

A simple method is described for the accurate and precise measurement of chromatic aberration under electron-optical conditions pertinent to scanning transmission electron microscopy (STEM) and scanning confocal electron microscopy (SCEM). The method requires only the measurement of distances in a coherent CBED pattern and knowledge of the electron wavelength and the lattice spacing of a calibration specimen. The chromatic aberration of a spherical-aberration corrected 300 kV thermal field emission TEM is measured in STEM and SCEM operating modes and under different condenser lens settings. The effect of the measured chromatic aberrations on the 3 dimensional intensity distribution of the electron probe is also considered.
Original languageEnglish
Pages (from-to)49 - 58
Number of pages10
JournalUltramicroscopy
Volume125
DOIs
Publication statusPublished - 2013

Cite this

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abstract = "A simple method is described for the accurate and precise measurement of chromatic aberration under electron-optical conditions pertinent to scanning transmission electron microscopy (STEM) and scanning confocal electron microscopy (SCEM). The method requires only the measurement of distances in a coherent CBED pattern and knowledge of the electron wavelength and the lattice spacing of a calibration specimen. The chromatic aberration of a spherical-aberration corrected 300 kV thermal field emission TEM is measured in STEM and SCEM operating modes and under different condenser lens settings. The effect of the measured chromatic aberrations on the 3 dimensional intensity distribution of the electron probe is also considered.",
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Measurement of chromatic aberration in STEM and SCEM by coherent convergent beam electron diffraction. / Zheng, Changlin; Etheridge, Joanne.

In: Ultramicroscopy, Vol. 125, 2013, p. 49 - 58.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

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AU - Zheng, Changlin

AU - Etheridge, Joanne

PY - 2013

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N2 - A simple method is described for the accurate and precise measurement of chromatic aberration under electron-optical conditions pertinent to scanning transmission electron microscopy (STEM) and scanning confocal electron microscopy (SCEM). The method requires only the measurement of distances in a coherent CBED pattern and knowledge of the electron wavelength and the lattice spacing of a calibration specimen. The chromatic aberration of a spherical-aberration corrected 300 kV thermal field emission TEM is measured in STEM and SCEM operating modes and under different condenser lens settings. The effect of the measured chromatic aberrations on the 3 dimensional intensity distribution of the electron probe is also considered.

AB - A simple method is described for the accurate and precise measurement of chromatic aberration under electron-optical conditions pertinent to scanning transmission electron microscopy (STEM) and scanning confocal electron microscopy (SCEM). The method requires only the measurement of distances in a coherent CBED pattern and knowledge of the electron wavelength and the lattice spacing of a calibration specimen. The chromatic aberration of a spherical-aberration corrected 300 kV thermal field emission TEM is measured in STEM and SCEM operating modes and under different condenser lens settings. The effect of the measured chromatic aberrations on the 3 dimensional intensity distribution of the electron probe is also considered.

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U2 - 10.1016/j.ultramic.2012.10.002

DO - 10.1016/j.ultramic.2012.10.002

M3 - Article

VL - 125

SP - 49

EP - 58

JO - Ultramicroscopy

JF - Ultramicroscopy

SN - 0304-3991

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