Material selection foro optimal design of thermally actuated pneumatic and phase change microactuators

Prasanna Srinivasan, Simon Spearing

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	239 - 249
Number of pages	11
Journal	Journal of Microelectromechanical Systems
Volume	18
Issue number	2
DOIs	https://doi.org/10.1109/JMEMS.2009.2013385
Publication status	Published - 2009
Externally published	Yes

Access to Document

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AU - Spearing, Simon

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