Mass loading in coupled resonators consisting of SU-8 micropillars fabricated over SAW devices

N. Ramakrishnan; Harshal B. Nemade; Roy Paily Palathinkal

doi:10.1109/JSEN.2010.2074193

Mass loading in coupled resonators consisting of SU-8 micropillars fabricated over SAW devices

N. Ramakrishnan, Harshal B. Nemade, Roy Paily Palathinkal

Research output: Contribution to journal › Article › Research › peer-review

27 Citations (Scopus)

Abstract

Surface acoustic wave (SAW) sensors extensively employ mass loading effect of a sensing film coated over the surface of a SAW device. We report experimental and simulation results of mass loading by SU-8 micropillars (in place of sensing film) attached normal to the surface of SAW resonators. For certain size of micropillars, we have observed an increase in the resonance frequency of the resonator, in contrast to the decrease in the resonance frequency normally caused by mass loading. The SAW resonator and the pillars constitute a system of coupled resonators, and for high values of stiffness at the interface of the pillar and substrate the shift in the resonance frequency is positive.

Original language	English
Article number	5585673
Pages (from-to)	430-431
Number of pages	2
Journal	IEEE Sensors Journal
Volume	11
Issue number	2
DOIs	https://doi.org/10.1109/JSEN.2010.2074193
Publication status	Published - 2011
Externally published	Yes

Keywords

Microelectromechanical devices
Microsensors
Resonance
Surface acoustic wave (SAW) devices

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10.1109/JSEN.2010.2074193

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abstract = "Surface acoustic wave (SAW) sensors extensively employ mass loading effect of a sensing film coated over the surface of a SAW device. We report experimental and simulation results of mass loading by SU-8 micropillars (in place of sensing film) attached normal to the surface of SAW resonators. For certain size of micropillars, we have observed an increase in the resonance frequency of the resonator, in contrast to the decrease in the resonance frequency normally caused by mass loading. The SAW resonator and the pillars constitute a system of coupled resonators, and for high values of stiffness at the interface of the pillar and substrate the shift in the resonance frequency is positive.",

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AB - Surface acoustic wave (SAW) sensors extensively employ mass loading effect of a sensing film coated over the surface of a SAW device. We report experimental and simulation results of mass loading by SU-8 micropillars (in place of sensing film) attached normal to the surface of SAW resonators. For certain size of micropillars, we have observed an increase in the resonance frequency of the resonator, in contrast to the decrease in the resonance frequency normally caused by mass loading. The SAW resonator and the pillars constitute a system of coupled resonators, and for high values of stiffness at the interface of the pillar and substrate the shift in the resonance frequency is positive.

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KW - Microsensors

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Mass loading in coupled resonators consisting of SU-8 micropillars fabricated over SAW devices

Abstract

Keywords

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