Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies

Sandra De Pedro; V. J. Cadarso; X. Muñoz-Berbel; J. A. Plaza; J. Sort; J. Brugger; Stephanus Büttgenbach; A. Llobera

doi:10.1109/MEMSYS.2013.6474300

Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies

Sandra De Pedro, V. J. Cadarso, X. Muñoz-Berbel, J. A. Plaza, J. Sort, J. Brugger, Stephanus Büttgenbach, A. Llobera

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

4 Citations (Scopus)

Abstract

This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.

Original language	English
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	548-551
Number of pages	4
ISBN (Print)	9781467356558
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474300
Publication status	Published - 2013
Externally published	Yes
Event	IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2013 - Taipei, Taiwan Duration: 20 Jan 2013 → 24 Jan 2013 Conference number: 26th https://ieeexplore.ieee.org/xpl/conhome/6471302/proceeding (Proceedings)

Conference

Conference	IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2013
Abbreviated title	MEMS 2013
Country/Territory	Taiwan
City	Taipei
Period	20/01/13 → 24/01/13
Internet address	https://ieeexplore.ieee.org/xpl/conhome/6471302/proceeding (Proceedings)

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10.1109/MEMSYS.2013.6474300

Cite this

De Pedro, S., Cadarso, V. J., Muñoz-Berbel, X., Plaza, J. A., Sort, J., Brugger, J., Büttgenbach, S., & Llobera, A. (2013). Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 548-551). Article 6474300 IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/MEMSYS.2013.6474300

De Pedro, Sandra ; Cadarso, V. J. ; Muñoz-Berbel, X. et al. / Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, Institute of Electrical and Electronics Engineers, 2013. pp. 548-551

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title = "Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies",

abstract = "This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.",

author = "\{De Pedro\}, Sandra and Cadarso, \{V. J.\} and X. Mu{\~n}oz-Berbel and Plaza, \{J. A.\} and J. Sort and J. Brugger and Stephanus B{\"u}ttgenbach and A. Llobera",

year = "2013",

doi = "10.1109/MEMSYS.2013.6474300",

language = "English",

isbn = "9781467356558",

pages = "548--551",

booktitle = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2013, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

url = "https://ieeexplore.ieee.org/xpl/conhome/6471302/proceeding",

}

De Pedro, S, Cadarso, VJ, Muñoz-Berbel, X, Plaza, JA, Sort, J, Brugger, J, Büttgenbach, S & Llobera, A 2013, Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474300, IEEE, Institute of Electrical and Electronics Engineers, pp. 548-551, IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2013, Taipei, Taiwan, 20/01/13. https://doi.org/10.1109/MEMSYS.2013.6474300

Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. / De Pedro, Sandra; Cadarso, V. J.; Muñoz-Berbel, X. et al.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, Institute of Electrical and Electronics Engineers, 2013. p. 548-551 6474300.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

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T1 - Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies

AU - De Pedro, Sandra

AU - Cadarso, V. J.

AU - Muñoz-Berbel, X.

AU - Plaza, J. A.

AU - Sort, J.

AU - Brugger, J.

AU - Büttgenbach, Stephanus

AU - Llobera, A.

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N2 - This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.

AB - This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.

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BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

PB - IEEE, Institute of Electrical and Electronics Engineers

T2 - IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2013

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ER -

De Pedro S, Cadarso VJ, Muñoz-Berbel X, Plaza JA, Sort J, Brugger J et al. Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, Institute of Electrical and Electronics Engineers. 2013. p. 548-551. 6474300 doi: 10.1109/MEMSYS.2013.6474300

Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies

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