Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies

Sandra De Pedro, V. J. Cadarso, X. Muñoz-Berbel, J. A. Plaza, J. Sort, J. Brugger, Stephanus Büttgenbach, A. Llobera

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

Abstract

This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages548-551
Number of pages4
ISBN (Print)9781467356558
DOIs
Publication statusPublished - 2013
Externally publishedYes
EventIEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2013 - Taipei, Taiwan
Duration: 20 Jan 201324 Jan 2013
Conference number: 26th

Conference

ConferenceIEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2013
Abbreviated titleMEMS 2013
CountryTaiwan
CityTaipei
Period20/01/1324/01/13

Cite this

De Pedro, S., Cadarso, V. J., Muñoz-Berbel, X., Plaza, J. A., Sort, J., Brugger, J., ... Llobera, A. (2013). Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 548-551). [6474300] IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/MEMSYS.2013.6474300
De Pedro, Sandra ; Cadarso, V. J. ; Muñoz-Berbel, X. ; Plaza, J. A. ; Sort, J. ; Brugger, J. ; Büttgenbach, Stephanus ; Llobera, A. / Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, Institute of Electrical and Electronics Engineers, 2013. pp. 548-551
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title = "Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies",
abstract = "This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.",
author = "{De Pedro}, Sandra and Cadarso, {V. J.} and X. Mu{\~n}oz-Berbel and Plaza, {J. A.} and J. Sort and J. Brugger and Stephanus B{\"u}ttgenbach and A. Llobera",
year = "2013",
doi = "10.1109/MEMSYS.2013.6474300",
language = "English",
isbn = "9781467356558",
pages = "548--551",
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publisher = "IEEE, Institute of Electrical and Electronics Engineers",
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De Pedro, S, Cadarso, VJ, Muñoz-Berbel, X, Plaza, JA, Sort, J, Brugger, J, Büttgenbach, S & Llobera, A 2013, Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474300, IEEE, Institute of Electrical and Electronics Engineers, pp. 548-551, IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2013, Taipei, Taiwan, 20/01/13. https://doi.org/10.1109/MEMSYS.2013.6474300

Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. / De Pedro, Sandra; Cadarso, V. J.; Muñoz-Berbel, X.; Plaza, J. A.; Sort, J.; Brugger, J.; Büttgenbach, Stephanus; Llobera, A.

IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, Institute of Electrical and Electronics Engineers, 2013. p. 548-551 6474300.

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

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AB - This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.

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De Pedro S, Cadarso VJ, Muñoz-Berbel X, Plaza JA, Sort J, Brugger J et al. Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, Institute of Electrical and Electronics Engineers. 2013. p. 548-551. 6474300 https://doi.org/10.1109/MEMSYS.2013.6474300