The lithium titanium oxynitride (LTON) thin film electrode was prepared by radio frequency (RF) mag-netron sputtering deposition using a cubic spinel structure Li4Ti5O12(LTO) powder target in a N2atmosphere for lithium ion batteries. XRD and SEM test results showed that the thin film was composed of weak crystal or amorphous structure and that its surface was homogeneous. XPS analyses indicatedthat nitrogen atoms were actually incorporated into the LTO matrix framework. The substitution of nitro-gen for oxygen in the thin film created more abundant cross-linking structures, which favored the highermobility of lithium ions. The LTON had a high capacity of 290 mAh g−1at 0.1C, excellent rate capabilityof 160 mAh g−1at 5C and only ≈7% capacity loss after 100 cycles at 5C charge and discharge rate. These properties make this thin film electrode a promising candidate material for use in thin film lithium ionbatteries.