Laser-based sensing, measurement, and misalignment control of coupled linear and angular motion for ultrahigh precision movement

Leon Clark, Bijan Shirinzadeh, Yanling Tian, Denny Oetomo

Research output: Contribution to journalArticleResearchpeer-review

41 Citations (Scopus)
Original languageEnglish
Pages (from-to)84 - 92
Number of pages9
JournalIEEE/ASME Transactions on Mechatronics
Volume20
Issue number1
DOIs
Publication statusPublished - 2015

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