Large-scale process optimization for focused ion beam 3-D nanofabrication

Ruwen Qin, Jing Fu, Zhaozheng Yin, Changxi Zheng

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)587 - 600
Number of pages14
JournalInternational Journal of Advanced Manufacturing Technology
Volume64
Issue number1-4
DOIs
Publication statusPublished - 2013

Cite this

Qin, Ruwen ; Fu, Jing ; Yin, Zhaozheng ; Zheng, Changxi. / Large-scale process optimization for focused ion beam 3-D nanofabrication. In: International Journal of Advanced Manufacturing Technology. 2013 ; Vol. 64, No. 1-4. pp. 587 - 600.
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Large-scale process optimization for focused ion beam 3-D nanofabrication. / Qin, Ruwen; Fu, Jing; Yin, Zhaozheng; Zheng, Changxi.

In: International Journal of Advanced Manufacturing Technology, Vol. 64, No. 1-4, 2013, p. 587 - 600.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Large-scale process optimization for focused ion beam 3-D nanofabrication

AU - Qin, Ruwen

AU - Fu, Jing

AU - Yin, Zhaozheng

AU - Zheng, Changxi

PY - 2013

Y1 - 2013

UR - http://link.springer.com.ezproxy.lib.monash.edu.au/article/10.1007/s00170-012-4429-0

U2 - 10.1007/s00170-012-4429-0

DO - 10.1007/s00170-012-4429-0

M3 - Article

VL - 64

SP - 587

EP - 600

JO - International Journal of Advanced Manufacturing Technology

JF - International Journal of Advanced Manufacturing Technology

SN - 0268-3768

IS - 1-4

ER -