Large-scale process optimization for focused ion beam 3-D nanofabrication

Ruwen Qin, Jing Fu, Zhaozheng Yin, Changxi Zheng

Research output: Contribution to journalArticleResearchpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)587 - 600
Number of pages14
JournalInternational Journal of Advanced Manufacturing Technology
Volume64
Issue number1-4
DOIs
Publication statusPublished - 2013

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