Large-scale integrated optics using tripleXtm waveguide technology: From UV to IR

René Heidemana; Arne Leinse; Willem Hoving; Ronald Dekker; Douwe Geuzebroek; Edwin Klein; Remco Stoffer; Chris Roeloffzen; Leimeng Zhuang; Arjan Meijerink

doi:10.1117/12.808409

Large-scale integrated optics using tripleXtm waveguide technology: From UV to IR

René Heidemana, Arne Leinse, Willem Hoving, Ronald Dekker, Douwe Geuzebroek, Edwin Klein, Remco Stoffer, Chris Roeloffzen, Leimeng Zhuang, Arjan Meijerink

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

44 Citations (Scopus)

Abstract

We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.

Original language	English
Title of host publication	Photonics Packaging, Integration, and Interconnects IX
Volume	7221
DOIs	https://doi.org/10.1117/12.808409
Publication status	Published - 2009
Externally published	Yes
Event	Photonics Packaging, Integration, and Interconnects IX - San Jose, CA, United States of America Duration: 26 Jan 2009 → 28 Jan 2009

Conference

Conference	Photonics Packaging, Integration, and Interconnects IX
Country/Territory	United States of America
City	San Jose, CA
Period	26/01/09 → 28/01/09

Keywords

Birefringence
CMOS compatible
integrated optics
IR
low loss
Multilayer waveguides
Optical waveguides
PLCs
UV
Visible

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10.1117/12.808409

Cite this

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title = "Large-scale integrated optics using tripleXtm waveguide technology: From UV to IR",

abstract = "We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.",

keywords = "Birefringence, CMOS compatible, integrated optics, IR, low loss, Multilayer waveguides, Optical waveguides, PLCs, UV, Visible",

author = "Ren{\'e} Heidemana and Arne Leinse and Willem Hoving and Ronald Dekker and Douwe Geuzebroek and Edwin Klein and Remco Stoffer and Chris Roeloffzen and Leimeng Zhuang and Arjan Meijerink",

year = "2009",

doi = "10.1117/12.808409",

language = "English",

isbn = "9780819474674",

volume = "7221",

booktitle = "Photonics Packaging, Integration, and Interconnects IX",

note = "Photonics Packaging, Integration, and Interconnects IX ; Conference date: 26-01-2009 Through 28-01-2009",

}

Heidemana, R, Leinse, A, Hoving, W, Dekker, R, Geuzebroek, D, Klein, E, Stoffer, R, Roeloffzen, C, Zhuang, L & Meijerink, A 2009, Large-scale integrated optics using tripleXtm waveguide technology: From UV to IR. in Photonics Packaging, Integration, and Interconnects IX. vol. 7221, 72210R, Photonics Packaging, Integration, and Interconnects IX, San Jose, CA, United States of America, 26/01/09. https://doi.org/10.1117/12.808409

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T1 - Large-scale integrated optics using tripleXtm waveguide technology

T2 - Photonics Packaging, Integration, and Interconnects IX

AU - Heidemana, René

AU - Leinse, Arne

AU - Hoving, Willem

AU - Dekker, Ronald

AU - Geuzebroek, Douwe

AU - Klein, Edwin

AU - Stoffer, Remco

AU - Roeloffzen, Chris

AU - Zhuang, Leimeng

AU - Meijerink, Arjan

PY - 2009

Y1 - 2009

N2 - We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.

AB - We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.

KW - Birefringence

KW - CMOS compatible

KW - integrated optics

KW - IR

KW - low loss

KW - Multilayer waveguides

KW - Optical waveguides

KW - PLCs

KW - UV

KW - Visible

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U2 - 10.1117/12.808409

DO - 10.1117/12.808409

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AN - SCOPUS:66749118364

SN - 9780819474674

VL - 7221

BT - Photonics Packaging, Integration, and Interconnects IX

Y2 - 26 January 2009 through 28 January 2009

ER -

Large-scale integrated optics using tripleXtm waveguide technology: From UV to IR

Abstract

Conference

Keywords

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