Langasite resonator with non-uniform electrode thickness: design, simulation, and fabrication

Ismaeel Shah; Tridib Saha

doi:10.1109/SENNANO51750.2021.9642707

Langasite resonator with non-uniform electrode thickness: design, simulation, and fabrication

Ismaeel Shah, Tridib Saha

Malaysia Sch of Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

1 Citation (Scopus)

Abstract

Thickness-shear langasite resonator with non-uniform elliptical electrodes was designed, simulated, and fabricated to investigate the effects of varying electrode thickness on the spurious mode vibrations. A 3D FEM study was conducted to determine the optimal electrode design and verify the electrode design theories reported in literature. Simulated results showed 11% higher peak displacement for the optimized stepped design compared to that of the standard key-hole pattern, which can be attributed to enhanced energy trapping. Test results of the fabricated resonators also demonstrated similar improvements. Higher quality factor, enhanced suppression of spurious vibrations, and wider separation between the resonant and spurious mode were observed for the resonator with stepped electrodes compared to circular electrodes. The results verify our optimized design and demonstrate great potential for langasite-based sensors.

Original language	English
Title of host publication	2021 IEEE International Conference on Sensors and Nanotechnology (SENNANO)
Editors	Mohamad Faris Mohamad Fathil, Mohd Khairuddin Md Arshad
Place of Publication	Piscataway NJ USA
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	97-100
Number of pages	4
ISBN (Electronic)	9781665404396
ISBN (Print)	9781665447157
DOIs	https://doi.org/10.1109/SENNANO51750.2021.9642707
Publication status	Published - 2021
Event	IEEE International Conference on Sensors and Nanotechnology 2021 - Online, Malaysia Duration: 22 Sept 2021 → 24 Sept 2021 https://ieeexplore.ieee.org/xpl/conhome/9642487/proceeding (Proceedings) https://sensors-nano.ieeemy.org/conference/ (Websites)

Conference

Conference	IEEE International Conference on Sensors and Nanotechnology 2021
Abbreviated title	SENNANO 2021
Country/Territory	Malaysia
Period	22/09/21 → 24/09/21
Internet address	https://ieeexplore.ieee.org/xpl/conhome/9642487/proceeding (Proceedings) https://sensors-nano.ieeemy.org/conference/ (Websites)

Keywords

fabrication
FEM simulation
langasite
non-uniform electrode
stepped elliptical electrode
thickness shear mode

Access to Document

10.1109/SENNANO51750.2021.9642707

Cite this

Shah, I., & Saha, T. (2021). Langasite resonator with non-uniform electrode thickness: design, simulation, and fabrication. In M. Faris Mohamad Fathil, & M. Khairuddin Md Arshad (Eds.), 2021 IEEE International Conference on Sensors and Nanotechnology (SENNANO) (pp. 97-100). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/SENNANO51750.2021.9642707

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title = "Langasite resonator with non-uniform electrode thickness: design, simulation, and fabrication",

abstract = "Thickness-shear langasite resonator with non-uniform elliptical electrodes was designed, simulated, and fabricated to investigate the effects of varying electrode thickness on the spurious mode vibrations. A 3D FEM study was conducted to determine the optimal electrode design and verify the electrode design theories reported in literature. Simulated results showed 11% higher peak displacement for the optimized stepped design compared to that of the standard key-hole pattern, which can be attributed to enhanced energy trapping. Test results of the fabricated resonators also demonstrated similar improvements. Higher quality factor, enhanced suppression of spurious vibrations, and wider separation between the resonant and spurious mode were observed for the resonator with stepped electrodes compared to circular electrodes. The results verify our optimized design and demonstrate great potential for langasite-based sensors. ",

keywords = "fabrication, FEM simulation, langasite, non-uniform electrode, stepped elliptical electrode, thickness shear mode",

author = "Ismaeel Shah and Tridib Saha",

note = "Funding Information: This research was funded by the Ministry of Higher Education, Malaysia Fundamental Research Grant Scheme FRGS/1/2019/STG02/MUSM/03/1. We also thank Mr. Yusuke Hayakawa from Piezo Parts Co. Ltd., Japan, for his advice and support with the fabrication of langasite resonators. Publisher Copyright: {\textcopyright} 2021 IEEE.; IEEE International Conference on Sensors and Nanotechnology 2021, SENNANO 2021 ; Conference date: 22-09-2021 Through 24-09-2021",

year = "2021",

doi = "10.1109/SENNANO51750.2021.9642707",

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publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

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Shah, I & Saha, T 2021, Langasite resonator with non-uniform electrode thickness: design, simulation, and fabrication. in M Faris Mohamad Fathil & M Khairuddin Md Arshad (eds), 2021 IEEE International Conference on Sensors and Nanotechnology (SENNANO). IEEE, Institute of Electrical and Electronics Engineers, Piscataway NJ USA, pp. 97-100, IEEE International Conference on Sensors and Nanotechnology 2021, Malaysia, 22/09/21. https://doi.org/10.1109/SENNANO51750.2021.9642707

Langasite resonator with non-uniform electrode thickness: design, simulation, and fabrication. / Shah, Ismaeel; Saha, Tridib.
2021 IEEE International Conference on Sensors and Nanotechnology (SENNANO). ed. / Mohamad Faris Mohamad Fathil; Mohd Khairuddin Md Arshad. Piscataway NJ USA: IEEE, Institute of Electrical and Electronics Engineers, 2021. p. 97-100.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Langasite resonator with non-uniform electrode thickness

T2 - IEEE International Conference on Sensors and Nanotechnology 2021

AU - Shah, Ismaeel

AU - Saha, Tridib

N1 - Funding Information: This research was funded by the Ministry of Higher Education, Malaysia Fundamental Research Grant Scheme FRGS/1/2019/STG02/MUSM/03/1. We also thank Mr. Yusuke Hayakawa from Piezo Parts Co. Ltd., Japan, for his advice and support with the fabrication of langasite resonators. Publisher Copyright: © 2021 IEEE.

PY - 2021

Y1 - 2021

N2 - Thickness-shear langasite resonator with non-uniform elliptical electrodes was designed, simulated, and fabricated to investigate the effects of varying electrode thickness on the spurious mode vibrations. A 3D FEM study was conducted to determine the optimal electrode design and verify the electrode design theories reported in literature. Simulated results showed 11% higher peak displacement for the optimized stepped design compared to that of the standard key-hole pattern, which can be attributed to enhanced energy trapping. Test results of the fabricated resonators also demonstrated similar improvements. Higher quality factor, enhanced suppression of spurious vibrations, and wider separation between the resonant and spurious mode were observed for the resonator with stepped electrodes compared to circular electrodes. The results verify our optimized design and demonstrate great potential for langasite-based sensors.

AB - Thickness-shear langasite resonator with non-uniform elliptical electrodes was designed, simulated, and fabricated to investigate the effects of varying electrode thickness on the spurious mode vibrations. A 3D FEM study was conducted to determine the optimal electrode design and verify the electrode design theories reported in literature. Simulated results showed 11% higher peak displacement for the optimized stepped design compared to that of the standard key-hole pattern, which can be attributed to enhanced energy trapping. Test results of the fabricated resonators also demonstrated similar improvements. Higher quality factor, enhanced suppression of spurious vibrations, and wider separation between the resonant and spurious mode were observed for the resonator with stepped electrodes compared to circular electrodes. The results verify our optimized design and demonstrate great potential for langasite-based sensors.

KW - fabrication

KW - FEM simulation

KW - langasite

KW - non-uniform electrode

KW - stepped elliptical electrode

KW - thickness shear mode

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U2 - 10.1109/SENNANO51750.2021.9642707

DO - 10.1109/SENNANO51750.2021.9642707

M3 - Conference Paper

AN - SCOPUS:85124027539

SN - 9781665447157

SP - 97

EP - 100

BT - 2021 IEEE International Conference on Sensors and Nanotechnology (SENNANO)

A2 - Faris Mohamad Fathil, Mohamad

A2 - Khairuddin Md Arshad, Mohd

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - Piscataway NJ USA

Y2 - 22 September 2021 through 24 September 2021

ER -

Shah I, Saha T. Langasite resonator with non-uniform electrode thickness: design, simulation, and fabrication. In Faris Mohamad Fathil M, Khairuddin Md Arshad M, editors, 2021 IEEE International Conference on Sensors and Nanotechnology (SENNANO). Piscataway NJ USA: IEEE, Institute of Electrical and Electronics Engineers. 2021. p. 97-100 doi: 10.1109/SENNANO51750.2021.9642707

Langasite resonator with non-uniform electrode thickness: design, simulation, and fabrication

Abstract

Conference

Keywords

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