Kinematics and its solution methodology of A 3-PRR flexure-based parallel mechanism

Y. Tian, B. Shirinzadeh, D. Zhang, S. Fatikow

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Abstract

This paper presents the mechanical design and kinematic analysis methodologies of a 3-PRR flexure-based parallel mechanism, which can be utilized to conduct planar precision positioning as required for automating micro/ nano manipulation tasks. Flexure hinges are used as the revolute joints to provide smooth motion in the range of micrometers. Three high performance piezoelectric actuators are utilized to drive the flexure-based mechanism. The kinematics of the proposed flexure-based parallel mechanism is established. Finite element analysis is conducted to validate the performance of the 3-PRR flexure-based parallel mechanism. Two simplified methodologies are proposed to improve the computational efficiency of the kinematics of the developed mechanism.

Original languageEnglish
Title of host publicationProceedings of the IASTED International Conference on Modelling, Simulation, and Identification, MSI 2009
Publication statusPublished - 2009
EventIASTED International Conference on Modelling, Simulation, and Identification, MSI 2009 - Beijing, China
Duration: 12 Oct 200914 Oct 2009

Conference

ConferenceIASTED International Conference on Modelling, Simulation, and Identification, MSI 2009
CountryChina
CityBeijing
Period12/10/0914/10/09

Keywords

  • Flexure hinge
  • Kinematics
  • Mechanical design
  • Micro/nano manipulation

Cite this

Tian, Y., Shirinzadeh, B., Zhang, D., & Fatikow, S. (2009). Kinematics and its solution methodology of A 3-PRR flexure-based parallel mechanism. In Proceedings of the IASTED International Conference on Modelling, Simulation, and Identification, MSI 2009