Inkjet printed SU-8 hemispherical microcapsules and silicon chip embedding

Loic Jacot-Descombes, Maurizio Rosario Gullo, Massimo Mastrangeli, Victor Javier Cadarso, Jürgen Brugger

Research output: Contribution to journalArticleResearchpeer-review

13 Citations (Scopus)

Abstract

Planar lithography techniques are not effective for precise fabrication of microdevices with hemispherical shapes. Drop-on-demand (DOD) inkjet printing (IJP) of photo-curable ink is a more appropriate fabrication approach as it takes advantage of the surface tension as well as of the delivery of a well-defined ink volume. Described is a DOD IJP technique onto geometrically-patterned silicon substrates enabling the controlled fabrication of SU-8 hemispherical microcapsules. Open half capsules of 100 µm in diameter with inner cavity volumes of 5, 20 and 45 pl with a printing yield above 96% are demonstrated. The same technique is directly adapted to the fabrication of microcapsules embedding silicon microchips. The reported findings open new paths for controlled encapsulation of liquids into smart microsystems. 

Original languageEnglish
Pages (from-to)633-636
Number of pages4
JournalMicro and Nano Letters
Volume8
Issue number10
DOIs
Publication statusPublished - Oct 2013
Externally publishedYes

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