TY - JOUR
T1 - Inkjet printed SU-8 hemispherical microcapsules and silicon chip embedding
AU - Jacot-Descombes, Loic
AU - Gullo, Maurizio Rosario
AU - Mastrangeli, Massimo
AU - Cadarso, Victor Javier
AU - Brugger, Jürgen
PY - 2013/10
Y1 - 2013/10
N2 - Planar lithography techniques are not effective for precise fabrication of microdevices with hemispherical shapes. Drop-on-demand (DOD) inkjet printing (IJP) of photo-curable ink is a more appropriate fabrication approach as it takes advantage of the surface tension as well as of the delivery of a well-defined ink volume. Described is a DOD IJP technique onto geometrically-patterned silicon substrates enabling the controlled fabrication of SU-8 hemispherical microcapsules. Open half capsules of 100 µm in diameter with inner cavity volumes of 5, 20 and 45 pl with a printing yield above 96% are demonstrated. The same technique is directly adapted to the fabrication of microcapsules embedding silicon microchips. The reported findings open new paths for controlled encapsulation of liquids into smart microsystems.
AB - Planar lithography techniques are not effective for precise fabrication of microdevices with hemispherical shapes. Drop-on-demand (DOD) inkjet printing (IJP) of photo-curable ink is a more appropriate fabrication approach as it takes advantage of the surface tension as well as of the delivery of a well-defined ink volume. Described is a DOD IJP technique onto geometrically-patterned silicon substrates enabling the controlled fabrication of SU-8 hemispherical microcapsules. Open half capsules of 100 µm in diameter with inner cavity volumes of 5, 20 and 45 pl with a printing yield above 96% are demonstrated. The same technique is directly adapted to the fabrication of microcapsules embedding silicon microchips. The reported findings open new paths for controlled encapsulation of liquids into smart microsystems.
UR - http://www.scopus.com/inward/record.url?scp=84887038128&partnerID=8YFLogxK
U2 - 10.1049/mnl.2013.0241
DO - 10.1049/mnl.2013.0241
M3 - Article
AN - SCOPUS:84887038128
VL - 8
SP - 633
EP - 636
JO - Micro and Nano Letters
JF - Micro and Nano Letters
SN - 1750-0443
IS - 10
ER -