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Infrared and density-functional-theory study of spherosiloxane-based model silicon/silicon oxide interfaces

  • Kenneth T. Nicholson
  • , Mark M. Banaszak Holl

Research output: Contribution to journalArticleResearchpeer-review

Abstract

Nonlocal density functional theory (NL-DFT) (B3-LYP, 6-31 (formula presented)) has been employed to calculate infrared frequencies and intensities for five structural models of (formula presented) on (formula presented) These calculations are compared to experimental results from reflection-absorption infrared spectroscopy (RAIRS). Three single-vertex models have been examined where (formula presented) (formula presented) and a nine-atom silicon slab have been used to model the silicon surface. Two double-vertex models have also been studied which represent a cluster bridging two dimer rows and an edge-activated cluster across a dimer row, respectively. This RAIRS/NL-DFT investigation supports a single-vertex bonding model for (formula presented) chemisorbed to (formula presented) This structure implies a radical-based mechanism for the reaction at the surface.

Original languageEnglish
JournalPhysical Review B
Volume64
Issue number15
DOIs
Publication statusPublished - 1 Jan 2001
Externally publishedYes

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