Influence of ion-bombardment cleaning on the aging rates in island copper films on fused quartz substrates

M. S. Murali Sastry, Manjunatha Pattabi

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Abstract

Presented in this communication are the results of aging experiments carried out on copper island films deposited on fused quartz substrates held at 380 K in a vacuum of 1×10-5 Torr. Ion-bombardment cleaning of the substrates prior to deposition of the films was found to significantly alter the aging rates in the films. The mobility coalescence model was operative during the aging process, and it is inferred from the data that adsorbed gases on the substrate surface affect the nucleation and reduce the mobility of copper islands, which reduces the aging rate. The mean island sizes were determined for some of the films from activation energy measurements.

Original languageEnglish
Pages (from-to)4073-4075
Number of pages3
JournalJournal of Applied Physics
Volume65
Issue number10
DOIs
Publication statusPublished - 1989
Externally publishedYes

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