Influence of experimental conditions on atom column visibility in energy dispersive X-ray spectroscopy

J H Dycus, W Xu, X Sang, A J D'Alfonso, Z Chen, M Weyland, L J Allen, S D Findlay, J M LeBeau

Research output: Contribution to journalArticleResearchpeer-review

5 Citations (Scopus)

Abstract

Here we report the influence of key experimental parameters on atomically resolved energy dispersive X-ray spectroscopy (EDX). In particular, we examine the role of the probe forming convergence semi-angle, sample thickness, lattice spacing, and dwell/collection time. We show that an optimum specimen-dependent probe forming convergence angle exists to maximize the signal-to-noise ratio of the atomically resolved signal in EDX mapping. Furthermore, we highlight that it can be important to select an appropriate dwell time to efficiently process the X-ray signal. These practical considerations provide insight for experimental parameters in atomic resolution energy dispersive X-ray analysis
Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalUltramicroscopy
Volume171
DOIs
Publication statusPublished - Dec 2016

Keywords

  • Scanning transmission electron microscopy (STEM)
  • Atomic resolution
  • Energy-dispersive X-ray spectroscopy
  • Electron channeling
  • Probe convergence angle

Cite this

Dycus, J H ; Xu, W ; Sang, X ; D'Alfonso, A J ; Chen, Z ; Weyland, M ; Allen, L J ; Findlay, S D ; LeBeau, J M. / Influence of experimental conditions on atom column visibility in energy dispersive X-ray spectroscopy. In: Ultramicroscopy. 2016 ; Vol. 171. pp. 1-7.
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abstract = "Here we report the influence of key experimental parameters on atomically resolved energy dispersive X-ray spectroscopy (EDX). In particular, we examine the role of the probe forming convergence semi-angle, sample thickness, lattice spacing, and dwell/collection time. We show that an optimum specimen-dependent probe forming convergence angle exists to maximize the signal-to-noise ratio of the atomically resolved signal in EDX mapping. Furthermore, we highlight that it can be important to select an appropriate dwell time to efficiently process the X-ray signal. These practical considerations provide insight for experimental parameters in atomic resolution energy dispersive X-ray analysis",
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author = "Dycus, {J H} and W Xu and X Sang and D'Alfonso, {A J} and Z Chen and M Weyland and Allen, {L J} and Findlay, {S D} and LeBeau, {J M}",
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Influence of experimental conditions on atom column visibility in energy dispersive X-ray spectroscopy. / Dycus, J H; Xu, W; Sang, X; D'Alfonso, A J; Chen, Z; Weyland, M; Allen, L J; Findlay, S D; LeBeau, J M.

In: Ultramicroscopy, Vol. 171, 12.2016, p. 1-7.

Research output: Contribution to journalArticleResearchpeer-review

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AU - Allen, L J

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KW - Scanning transmission electron microscopy (STEM)

KW - Atomic resolution

KW - Energy-dispersive X-ray spectroscopy

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