Influence of experimental conditions on atom column visibility in energy dispersive X-ray spectroscopy

J H Dycus, W Xu, X Sang, A J D'Alfonso, Z Chen, M Weyland, L J Allen, S D Findlay, J M LeBeau

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8 Citations (Scopus)


Here we report the influence of key experimental parameters on atomically resolved energy dispersive X-ray spectroscopy (EDX). In particular, we examine the role of the probe forming convergence semi-angle, sample thickness, lattice spacing, and dwell/collection time. We show that an optimum specimen-dependent probe forming convergence angle exists to maximize the signal-to-noise ratio of the atomically resolved signal in EDX mapping. Furthermore, we highlight that it can be important to select an appropriate dwell time to efficiently process the X-ray signal. These practical considerations provide insight for experimental parameters in atomic resolution energy dispersive X-ray analysis
Original languageEnglish
Pages (from-to)1-7
Number of pages7
Publication statusPublished - Dec 2016


  • Scanning transmission electron microscopy (STEM)
  • Atomic resolution
  • Energy-dispersive X-ray spectroscopy
  • Electron channeling
  • Probe convergence angle

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