In situ lift-out dedicated techniques using FIB-SEM system for TEM specimen preparation

Dacian Tomus, Hoi-Pang Ng

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)115 - 119
Number of pages5
JournalMicron
Volume44
Issue number1
DOIs
Publication statusPublished - 2013

Cite this

Tomus, Dacian ; Ng, Hoi-Pang. / In situ lift-out dedicated techniques using FIB-SEM system for TEM specimen preparation. In: Micron. 2013 ; Vol. 44, No. 1. pp. 115 - 119.
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title = "In situ lift-out dedicated techniques using FIB-SEM system for TEM specimen preparation",
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year = "2013",
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In situ lift-out dedicated techniques using FIB-SEM system for TEM specimen preparation. / Tomus, Dacian; Ng, Hoi-Pang.

In: Micron, Vol. 44, No. 1, 2013, p. 115 - 119.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - In situ lift-out dedicated techniques using FIB-SEM system for TEM specimen preparation

AU - Tomus, Dacian

AU - Ng, Hoi-Pang

PY - 2013

Y1 - 2013

UR - http://www.sciencedirect.com/science/article/pii/S0968432812001576

U2 - 10.1016/j.micron.2012.05.006

DO - 10.1016/j.micron.2012.05.006

M3 - Article

VL - 44

SP - 115

EP - 119

JO - Micron

JF - Micron

SN - 0968-4328

IS - 1

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