Identifying systematic failures on semiconductor wafers using ADCAS

Melanie Po-Leen Ooi; Hong Kuan Sok; Ye Chow Kuang; Huiyuan Cheng; Joo Sim Eric Kwang; Serge N. Demidenko; Chris Chan

doi:10.1109/MDAT.2013.2253151

Identifying systematic failures on semiconductor wafers using ADCAS

Melanie Po-Leen Ooi, Hong Kuan Sok, Ye Chow Kuang, Huiyuan Cheng, Joo Sim Eric Kwang, Serge N. Demidenko, Chris Chan

Malaysia Sch of Engineering

Research output: Contribution to journal › Article › Research › peer-review

2 Citations (Scopus)

Original language	English
Pages (from-to)	44 - 53
Number of pages	10
Journal	IEEE Design & Test
Volume	30
Issue number	5
DOIs	https://doi.org/10.1109/MDAT.2013.2253151
Publication status	Published - 2013

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10.1109/MDAT.2013.2253151

Cite this

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title = "Identifying systematic failures on semiconductor wafers using ADCAS",

author = "Ooi, {Melanie Po-Leen} and Sok, {Hong Kuan} and Kuang, {Ye Chow} and Huiyuan Cheng and Kwang, {Joo Sim Eric} and Demidenko, {Serge N.} and Chris Chan",

year = "2013",

doi = "10.1109/MDAT.2013.2253151",

language = "English",

volume = "30",

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issn = "2168-2356",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

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AU - Ooi, Melanie Po-Leen

AU - Sok, Hong Kuan

AU - Kuang, Ye Chow

AU - Cheng, Huiyuan

AU - Kwang, Joo Sim Eric

AU - Demidenko, Serge N.

AU - Chan, Chris

PY - 2013

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U2 - 10.1109/MDAT.2013.2253151

DO - 10.1109/MDAT.2013.2253151

M3 - Article

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SP - 44

EP - 53

JO - IEEE Design & Test

JF - IEEE Design & Test

SN - 2168-2356

IS - 5

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