Hydrogen and ozone SAW based gas sensors with RF magnetron sputtered InOx and electron beam evaporated SiNy

Alexandru C Fechete, Anurat Wisitsora-at, Wojtek Wlodarski, Kourosh Kalantar-Zadeh, Sasikaran Kandasamy, Anthony Stephen Holland

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)206 - 209
Number of pages4
JournalXiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering
Publication statusPublished - 2006
Externally publishedYes

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