High tilt, automated, electron tomography of materials by incoherent (HAADF) and inelastic (EFTEM) scattering

M. Weyland, L. Laffont, P. A. Midgley

Research output: Contribution to journalConference articleResearchpeer-review

3 Citations (Scopus)

Abstract

High angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) tomography and energy filtered transmission electron microscopy (EFTEM) tomography are promising techniques for the analysis of nanostructured materials. This paper describes the development of materials tomography methodology using modified holder designs and fully automated acquisition schemes. The details of the improvement achieved are demonstrated, potential pitfalls with EFTEM tomography examined and possible future directions discussed.

Original languageEnglish
Pages (from-to)349-352
Number of pages4
JournalInstitute of Physics Conference Series
Volume179
Publication statusPublished - 19 Oct 2004
Externally publishedYes
EventElectron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference - Oxford, United Kingdom
Duration: 3 Sep 20035 Sep 2003

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