High angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) tomography and energy filtered transmission electron microscopy (EFTEM) tomography are promising techniques for the analysis of nanostructured materials. This paper describes the development of materials tomography methodology using modified holder designs and fully automated acquisition schemes. The details of the improvement achieved are demonstrated, potential pitfalls with EFTEM tomography examined and possible future directions discussed.
|Number of pages||4|
|Journal||Institute of Physics Conference Series|
|Publication status||Published - 19 Oct 2004|
|Event||Electron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference - Oxford, United Kingdom|
Duration: 3 Sep 2003 → 5 Sep 2003