High-resolution radial distribution function of pure ion-implanted amorphous silicon measured using tilted-illumination selected-area electron diffraction

Alexander Robert Gorecki, Amelia Chi Ying Liu, Timothy Petersen

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)50 - 54
Number of pages5
JournalMicroscopy and Microanalysis
Issue number1
Publication statusPublished - 2014

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