High-quality Zn_xMg_1-xO thin films deposited from a single molecular source. Intimate mixing as a means to improved film properties

Zn_xMg_1-xO thin films have been deposited for the first time by single-source chemical vapor deposition (SSCVD). The films were grown using novel heterobimetallic Zn/Mg carbamato cluster complexes as single-source precursors. Films were characterized with X-ray diffraction, X-ray photoelectron spectroscopy, and scanning electron microscopy, and were found to possess a single preferred crystallite orientation, high purity with consistent elemental makeup throughout the film bulk, and a dense columnar morphology. Further investigations into the films' structures were performed using cathodoluminescence, and it was found that the incorporation of magnesium into the crystal lattice successfully quenched emissions from defect states that were otherwise observed. This provided confirmation of the first successful formation of the Zn_xMg_1-x thin film alloy through the use of SSCVD.