High aspect ratio nanoimprint process chains

Victor J. Cadarso, Nachiappan Chidambaram, Loïc Jacot-Descombes, Helmut Schift

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Article number	17017
Journal	Microsystems & Nanoengineering
Volume	3
DOIs	https://doi.org/10.1038/micronano.2017.17
Publication status	Published - 2017
Externally published	Yes

Keywords

@article{16396afbb5154943b4dd06aa8a850264,

title = "High aspect ratio nanoimprint process chains",

keywords = "Nanotechnology, Micro optics, Nanophotonics",

author = "Cadarso, {Victor J.} and Nachiappan Chidambaram and Lo{\"i}c Jacot-Descombes and Helmut Schift",

note = "Invited paper",

year = "2017",

doi = "10.1038/micronano.2017.17",

language = "English",

volume = "3",

journal = "Microsystems & Nanoengineering",

issn = "2055-7434",

publisher = "Nature Publishing Group",

}

TY - JOUR

T1 - High aspect ratio nanoimprint process chains

AU - Cadarso, Victor J.

AU - Chidambaram, Nachiappan

AU - Jacot-Descombes, Loïc

AU - Schift, Helmut

N1 - Invited paper

PY - 2017

Y1 - 2017

KW - Nanotechnology

KW - Micro optics

KW - Nanophotonics

U2 - 10.1038/micronano.2017.17

DO - 10.1038/micronano.2017.17

M3 - Article

SN - 2055-7434

VL - 3

JO - Microsystems & Nanoengineering

JF - Microsystems & Nanoengineering

M1 - 17017

ER -