High aspect ratio nano fluidic channels by laser-controlled fracturing

Allan P. Hui, Shui jie Qin, Wen J. Li, Michael Y. Wang

Research output: Chapter in Book/Report/Conference proceedingConference PaperOther

10 Citations (Scopus)


This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:YAG laser was used to dry fabricate micro channels (25μm-100μm diameter) in a 1cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼104 depth to width ratio). The length of the channels is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.

Original languageEnglish
Title of host publicationInternational Conference on Micro Electro Mechanical Systems
PublisherIEEE, Institute of Electrical and Electronics Engineers
Number of pages4
Publication statusPublished - 2002
Externally publishedYes
IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2002
- Las Vegas, NV, United States of America
Duration: 20 Jan 200224 Jan 2002
Conference number: 15th
https://ieeexplore.ieee.org/xpl/conhome/7726/proceeding (Proceedings)


IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2002
Abbreviated titleMEMS 2002
Country/TerritoryUnited States of America
CityLas Vegas, NV
Internet address

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