High aspect ratio nano fluidic channels by laser-controlled fracturing

Allan P. Hui; Shui jie Qin; Wen J. Li; Michael Y. Wang

High aspect ratio nano fluidic channels by laser-controlled fracturing

Allan P. Hui, Shui jie Qin, Wen J. Li, Michael Y. Wang

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Other

Abstract

This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:YAG laser was used to dry fabricate micro channels (25μm-100μm diameter) in a 1cm³ fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼10⁴ depth to width ratio). The length of the channels is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.

Original language	English
Title of host publication	International Conference on Micro Electro Mechanical Systems
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	156-159
Number of pages	4
Publication status	Published - 2002
Externally published	Yes
Event	IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2002 - Las Vegas, NV, United States of America Duration: 20 Jan 2002 → 24 Jan 2002 Conference number: 15th https://ieeexplore.ieee.org/xpl/conhome/7726/proceeding (Proceedings)

Conference

Conference	IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2002
Abbreviated title	MEMS 2002
Country/Territory	United States of America
City	Las Vegas, NV
Period	20/01/02 → 24/01/02
Internet address	https://ieeexplore.ieee.org/xpl/conhome/7726/proceeding (Proceedings)

Cite this

@inproceedings{fd5f83eeb6a944049b88e9972ce96dd3,

title = "High aspect ratio nano fluidic channels by laser-controlled fracturing",

abstract = "This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:YAG laser was used to dry fabricate micro channels (25μm-100μm diameter) in a 1cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼104 depth to width ratio). The length of the channels is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.",

author = "Hui, {Allan P.} and Qin, {Shui jie} and Li, {Wen J.} and Wang, {Michael Y.}",

year = "2002",

language = "English",

pages = "156--159",

booktitle = "International Conference on Micro Electro Mechanical Systems",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "<br/>IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2002, MEMS 2002 ; Conference date: 20-01-2002 Through 24-01-2002",

url = "https://ieeexplore.ieee.org/xpl/conhome/7726/proceeding",

}

Hui, AP, Qin, SJ, Li, WJ & Wang, MY 2002, High aspect ratio nano fluidic channels by laser-controlled fracturing. in International Conference on Micro Electro Mechanical Systems. IEEE, Institute of Electrical and Electronics Engineers, pp. 156-159,
IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2002, Las Vegas, NV, United States of America, 20/01/02.

TY - GEN

T1 - High aspect ratio nano fluidic channels by laser-controlled fracturing

AU - Hui, Allan P.

AU - Qin, Shui jie

AU - Li, Wen J.

AU - Wang, Michael Y.

N1 - Conference code: 15th

PY - 2002

Y1 - 2002

N2 - This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:YAG laser was used to dry fabricate micro channels (25μm-100μm diameter) in a 1cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼104 depth to width ratio). The length of the channels is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.

AB - This paper reports a novel laser processing technique for making channels in the nano regime. A Nd:YAG laser was used to dry fabricate micro channels (25μm-100μm diameter) in a 1cm3 fused silica substrate by thermal-induced processing. By controlling the locations of these initiating micro channels on a silica cube, 1D-controllable self-connecting nano fractures can be formed as rectangular channels. These nano channels are smooth and with extremely high aspect ratio (∼104 depth to width ratio). The length of the channels is controlled by the separation of the initiating micro channels. This laser-based nano channel fabrication technique is fast and inexpensive, and with potential applications in capillary electrophoresis and electro-osmosis driven nano-filtration.

UR - http://www.scopus.com/inward/record.url?scp=0036194608&partnerID=8YFLogxK

M3 - Conference Paper

AN - SCOPUS:0036194608

SP - 156

EP - 159

BT - International Conference on Micro Electro Mechanical Systems

PB - IEEE, Institute of Electrical and Electronics Engineers

T2 - <br/>IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2002

Y2 - 20 January 2002 through 24 January 2002

ER -

High aspect ratio nano fluidic channels by laser-controlled fracturing

Abstract

Conference

Other files and links

Cite this