Fast and accurate automatic defect cluster extraction for semiconductor wafers

Po-Leen Ooi; Chris Chan; Wey Jean Tee; Ye Chow Kuang; Lindsay Kleeman; Serge Demidenko

doi:10.1109/DELTA.2010.66

Fast and accurate automatic defect cluster extraction for semiconductor wafers

Po-Leen Ooi
, Chris Chan
, Wey Jean Tee
, Ye Chow Kuang
, Lindsay Kleeman
, Serge Demidenko

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Proceedings Fifth IEEE International Symposium on Electronic Design, Test and Applications (DELTA 2010)
Editors	Ta Cao Minh
Place of Publication	CA USA
Publisher	IEEE, Institute of Electrical and Electronics Engineers
Pages	276 - 280
Number of pages	5
ISBN (Print)	9780769539782
DOIs	https://doi.org/10.1109/DELTA.2010.66
Publication status	Published - 2010
Event	IEEE International Symposium on Electronic Design, Test and Applications (DELTA) 2010 - Ho Chi Minh City, Vietnam Duration: 13 Jan 2010 → 15 Jan 2010 Conference number: 5th https://ieeexplore.ieee.org/xpl/conhome/5438527/proceeding (Proceedings)

Conference

Conference	IEEE International Symposium on Electronic Design, Test and Applications (DELTA) 2010
Abbreviated title	DELTA 2010
Country/Territory	Vietnam
City	Ho Chi Minh City
Period	13/01/10 → 15/01/10
Internet address	https://ieeexplore.ieee.org/xpl/conhome/5438527/proceeding (Proceedings)

Access to Document

10.1109/DELTA.2010.66

Cite this

Ooi, P.-L., Chan, C., Tee, W. J., Kuang, Y. C., Kleeman, L., & Demidenko, S. (2010). Fast and accurate automatic defect cluster extraction for semiconductor wafers. In T. C. Minh (Ed.), Proceedings Fifth IEEE International Symposium on Electronic Design, Test and Applications (DELTA 2010) (pp. 276 - 280). IEEE, Institute of Electrical and Electronics Engineers. https://doi.org/10.1109/DELTA.2010.66

@inproceedings{a1677e3bbe1548909d43071b24ec39de,

title = "Fast and accurate automatic defect cluster extraction for semiconductor wafers",

author = "Po-Leen Ooi and Chris Chan and Tee, \{Wey Jean\} and Kuang, \{Ye Chow\} and Lindsay Kleeman and Serge Demidenko",

year = "2010",

doi = "10.1109/DELTA.2010.66",

language = "English",

isbn = "9780769539782",

pages = "276 -- 280",

editor = "Minh, \{Ta Cao\}",

booktitle = "Proceedings Fifth IEEE International Symposium on Electronic Design, Test and Applications (DELTA 2010)",

publisher = "IEEE, Institute of Electrical and Electronics Engineers",

address = "United States of America",

note = "IEEE International Symposium on Electronic Design, Test and Applications (DELTA) 2010, DELTA 2010 ; Conference date: 13-01-2010 Through 15-01-2010",

url = "https://ieeexplore.ieee.org/xpl/conhome/5438527/proceeding",

}

Ooi, P-L, Chan, C, Tee, WJ, Kuang, YC, Kleeman, L & Demidenko, S 2010, Fast and accurate automatic defect cluster extraction for semiconductor wafers. in TC Minh (ed.), Proceedings Fifth IEEE International Symposium on Electronic Design, Test and Applications (DELTA 2010). IEEE, Institute of Electrical and Electronics Engineers, CA USA, pp. 276 - 280, IEEE International Symposium on Electronic Design, Test and Applications (DELTA) 2010, Ho Chi Minh City, Vietnam, 13/01/10. https://doi.org/10.1109/DELTA.2010.66

Fast and accurate automatic defect cluster extraction for semiconductor wafers. / Ooi, Po-Leen; Chan, Chris; Tee, Wey Jean et al.
Proceedings Fifth IEEE International Symposium on Electronic Design, Test and Applications (DELTA 2010). ed. / Ta Cao Minh. CA USA: IEEE, Institute of Electrical and Electronics Engineers, 2010. p. 276 - 280.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Fast and accurate automatic defect cluster extraction for semiconductor wafers

AU - Ooi, Po-Leen

AU - Chan, Chris

AU - Tee, Wey Jean

AU - Kuang, Ye Chow

AU - Kleeman, Lindsay

AU - Demidenko, Serge

N1 - Conference code: 5th

PY - 2010

Y1 - 2010

UR - http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=5438527

U2 - 10.1109/DELTA.2010.66

DO - 10.1109/DELTA.2010.66

M3 - Conference Paper

SN - 9780769539782

SP - 276

EP - 280

BT - Proceedings Fifth IEEE International Symposium on Electronic Design, Test and Applications (DELTA 2010)

A2 - Minh, Ta Cao

PB - IEEE, Institute of Electrical and Electronics Engineers

CY - CA USA

T2 - IEEE International Symposium on Electronic Design, Test and Applications (DELTA) 2010

Y2 - 13 January 2010 through 15 January 2010

ER -

Ooi PL, Chan C, Tee WJ, Kuang YC, Kleeman L, Demidenko S. Fast and accurate automatic defect cluster extraction for semiconductor wafers. In Minh TC, editor, Proceedings Fifth IEEE International Symposium on Electronic Design, Test and Applications (DELTA 2010). CA USA: IEEE, Institute of Electrical and Electronics Engineers. 2010. p. 276 - 280 doi: 10.1109/DELTA.2010.66

Fast and accurate automatic defect cluster extraction for semiconductor wafers

Conference

Access to Document

Other files and links

Cite this