Fast and accurate automatic defect cluster extraction for semiconductor wafers

Po-Leen Ooi, Chris Chan, Wey Jean Tee, Ye Chow Kuang, Lindsay Kleeman, Serge Demidenko

Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings Fifth IEEE International Symposium on Electronic Design, Test and Applications (DELTA 2010)
EditorsTa Cao Minh
Place of PublicationCA USA
PublisherIEEE, Institute of Electrical and Electronics Engineers
Pages276 - 280
Number of pages5
ISBN (Print)9780769539782
DOIs
Publication statusPublished - 2010
EventIEEE International Symposium on Electronic Design, Test and Applications (DELTA) 2010 - Ho Chi Minh City Vietnam, CA USA
Duration: 1 Jan 2010 → …

Conference

ConferenceIEEE International Symposium on Electronic Design, Test and Applications (DELTA) 2010
CityCA USA
Period1/01/10 → …

Cite this