Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching

Massimo Tormen; Alessandro Carpentiero; Lisa Vaccari; Matteo Altissimo; Enrico Ferrari; Danut Cojoc; Enzo Di Fabrizio

Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching

Massimo Tormen, Alessandro Carpentiero, Lisa Vaccari, Matteo Altissimo, Enrico Ferrari, Danut Cojoc, Enzo Di Fabrizio

Melbourne Centre for Nanofabrication

Research output: Contribution to journal › Article › Research › peer-review

Original language	English
Pages (from-to)	2920 - 2924
Number of pages	5
Journal	Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Volume	23
Issue number	6
Publication status	Published - 2005

Cite this

@article{c0a97e8d02be473cb5998fae319730d7,

title = "Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching",

author = "Massimo Tormen and Alessandro Carpentiero and Lisa Vaccari and Matteo Altissimo and Enrico Ferrari and Danut Cojoc and \{Di Fabrizio\}, Enzo",

year = "2005",

language = "English",

volume = "23",

pages = "2920 -- 2924",

journal = "Journal of Vacuum Science \& Technology B: Microelectronics Processing and Phenomena",

issn = "0734-211X",

number = "6",

}

Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching. / Tormen, Massimo; Carpentiero, Alessandro; Vaccari, Lisa et al.
In: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, Vol. 23, No. 6, 2005, p. 2920 - 2924.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching

AU - Tormen, Massimo

AU - Carpentiero, Alessandro

AU - Vaccari, Lisa

AU - Altissimo, Matteo

AU - Ferrari, Enrico

AU - Cojoc, Danut

AU - Di Fabrizio, Enzo

PY - 2005

Y1 - 2005

M3 - Article

SN - 0734-211X

VL - 23

SP - 2920

EP - 2924

JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

IS - 6

ER -