Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching

Massimo Tormen, Alessandro Carpentiero, Lisa Vaccari, Matteo Altissimo, Enrico Ferrari, Danut Cojoc, Enzo Di Fabrizio

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)2920 - 2924
Number of pages5
JournalJournal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Volume23
Issue number6
Publication statusPublished - 2005

Cite this

Tormen, Massimo ; Carpentiero, Alessandro ; Vaccari, Lisa ; Altissimo, Matteo ; Ferrari, Enrico ; Cojoc, Danut ; Di Fabrizio, Enzo. / Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching. In: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena. 2005 ; Vol. 23, No. 6. pp. 2920 - 2924.
@article{c0a97e8d02be473cb5998fae319730d7,
title = "Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching",
author = "Massimo Tormen and Alessandro Carpentiero and Lisa Vaccari and Matteo Altissimo and Enrico Ferrari and Danut Cojoc and {Di Fabrizio}, Enzo",
year = "2005",
language = "English",
volume = "23",
pages = "2920 -- 2924",
journal = "Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena",
issn = "0734-211X",
number = "6",

}

Tormen, M, Carpentiero, A, Vaccari, L, Altissimo, M, Ferrari, E, Cojoc, D & Di Fabrizio, E 2005, 'Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching', Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, vol. 23, no. 6, pp. 2920 - 2924.

Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching. / Tormen, Massimo; Carpentiero, Alessandro; Vaccari, Lisa; Altissimo, Matteo; Ferrari, Enrico; Cojoc, Danut; Di Fabrizio, Enzo.

In: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, Vol. 23, No. 6, 2005, p. 2920 - 2924.

Research output: Contribution to journalArticleResearchpeer-review

TY - JOUR

T1 - Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching

AU - Tormen, Massimo

AU - Carpentiero, Alessandro

AU - Vaccari, Lisa

AU - Altissimo, Matteo

AU - Ferrari, Enrico

AU - Cojoc, Danut

AU - Di Fabrizio, Enzo

PY - 2005

Y1 - 2005

M3 - Article

VL - 23

SP - 2920

EP - 2924

JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

SN - 0734-211X

IS - 6

ER -