Fabrication of three-dimensional stamps for embossing techniques by lithographically controlled isotopic wet etching

Massimo Tormen, Alessandro Carpentiero, Lisa Vaccari, Matteo Altissimo, Enrico Ferrari, Danut Cojoc, Enzo Di Fabrizio

Research output: Contribution to journalArticleResearchpeer-review

Original languageEnglish
Pages (from-to)2920 - 2924
Number of pages5
JournalJournal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Issue number6
Publication statusPublished - 2005

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