TY - JOUR
T1 - Fabrication of microstructures for optically driven micromachines using two-photon photopolymerization of UVcuring resins
AU - Asavei, Theodor
AU - Nieminen, Timo
AU - Heckenberg, Norman
AU - Rubinsztein-Dunlop, Halina
PY - 2009
Y1 - 2009
N2 - Two-photon photopolymerization of UV curing resins is an attractive method for the fabrication of microscopic transparent objects with size in the tens of micrometers range. We have been using this method to produce three-dimensional (3D) structures for optical micromanipulation, in an optical system based on a femtosecond laser. By carefully adjusting the laser power and the exposure time we were able to create micro-objects with well-defined 3D features and with resolution below the diffraction limit of light. We discuss the performance and capabilities of a microfabrication system, with some examples of its products.
AB - Two-photon photopolymerization of UV curing resins is an attractive method for the fabrication of microscopic transparent objects with size in the tens of micrometers range. We have been using this method to produce three-dimensional (3D) structures for optical micromanipulation, in an optical system based on a femtosecond laser. By carefully adjusting the laser power and the exposure time we were able to create micro-objects with well-defined 3D features and with resolution below the diffraction limit of light. We discuss the performance and capabilities of a microfabrication system, with some examples of its products.
UR - http://iopscience.iop.org/1464-4258/11/3/034001
U2 - 10.1088/1464-4258/11/3/034001
DO - 10.1088/1464-4258/11/3/034001
M3 - Article
SN - 1464-4258
VL - 11
SP - 1
EP - 7
JO - Journal of Optics A: Pure and Applied Optics
JF - Journal of Optics A: Pure and Applied Optics
IS - 3
ER -