Fabrication of high aspect ratio SU-8 microstructures on piezoelectric transducers

Ramakrishnan Narayanan; Harshal Nemade; Roy Palathinkal

doi:10.4028/www.scientific.net/AMM.110-116.3127

Fabrication of high aspect ratio SU-8 microstructures on piezoelectric transducers

Ramakrishnan Narayanan, Harshal Nemade, Roy Palathinkal

Malaysia Sch of Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

Original language	English
Title of host publication	Mechanical and Aerospace Engineering
Editors	Wu Fan
Place of Publication	Stafa-Zurch Switzerland
Publisher	Trans Tech Publications
Pages	3127 - 3131
Number of pages	5
Volume	110-116
ISBN (Print)	9783037852620
DOIs	https://doi.org/10.4028/www.scientific.net/AMM.110-116.3127
Publication status	Published - 2012
Event	International Conference on Mechanical and Aerospace Engineering (ICMAE) 2011 - Bangkok, Thailand Duration: 29 Jul 2011 → 31 Jul 2011 Conference number: 2nd https://www.scientific.net/AMM.110-116 (Proceedings)

Conference

Conference	International Conference on Mechanical and Aerospace Engineering (ICMAE) 2011
Abbreviated title	ICMAE 2011
Country/Territory	Thailand
City	Bangkok
Period	29/07/11 → 31/07/11
Internet address	https://www.scientific.net/AMM.110-116 (Proceedings)

Access to Document

10.4028/www.scientific.net/AMM.110-116.3127

Cite this

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title = "Fabrication of high aspect ratio SU-8 microstructures on piezoelectric transducers",

author = "Ramakrishnan Narayanan and Harshal Nemade and Roy Palathinkal",

year = "2012",

doi = "10.4028/www.scientific.net/AMM.110-116.3127",

language = "English",

isbn = "9783037852620",

volume = "110-116",

pages = "3127 -- 3131",

editor = "Wu Fan",

booktitle = "Mechanical and Aerospace Engineering",

publisher = "Trans Tech Publications",

address = "Switzerland",

note = "International Conference on Mechanical and Aerospace Engineering (ICMAE) 2011, ICMAE 2011 ; Conference date: 29-07-2011 Through 31-07-2011",

url = "https://www.scientific.net/AMM.110-116",

}

Narayanan, R, Nemade, H & Palathinkal, R 2012, Fabrication of high aspect ratio SU-8 microstructures on piezoelectric transducers. in W Fan (ed.), Mechanical and Aerospace Engineering. vol. 110-116, Trans Tech Publications, Stafa-Zurch Switzerland, pp. 3127 - 3131, International Conference on Mechanical and Aerospace Engineering (ICMAE) 2011, Bangkok, Thailand, 29/07/11. https://doi.org/10.4028/www.scientific.net/AMM.110-116.3127

Fabrication of high aspect ratio SU-8 microstructures on piezoelectric transducers. / Narayanan, Ramakrishnan; Nemade, Harshal; Palathinkal, Roy.
Mechanical and Aerospace Engineering. ed. / Wu Fan. Vol. 110-116 Stafa-Zurch Switzerland: Trans Tech Publications, 2012. p. 3127 - 3131.

Research output: Chapter in Book/Report/Conference proceeding › Conference Paper › Research › peer-review

TY - GEN

T1 - Fabrication of high aspect ratio SU-8 microstructures on piezoelectric transducers

AU - Narayanan, Ramakrishnan

AU - Nemade, Harshal

AU - Palathinkal, Roy

N1 - Conference code: 2nd

PY - 2012

Y1 - 2012

U2 - 10.4028/www.scientific.net/AMM.110-116.3127

DO - 10.4028/www.scientific.net/AMM.110-116.3127

M3 - Conference Paper

SN - 9783037852620

VL - 110-116

SP - 3127

EP - 3131

BT - Mechanical and Aerospace Engineering

A2 - Fan, Wu

PB - Trans Tech Publications

CY - Stafa-Zurch Switzerland

T2 - International Conference on Mechanical and Aerospace Engineering (ICMAE) 2011

Y2 - 29 July 2011 through 31 July 2011

ER -