Fabrication of high aspect ratio SU-8 microstructures on piezoelectric transducers

Ramakrishnan Narayanan, Harshal Nemade, Roy Palathinkal

    Research output: Chapter in Book/Report/Conference proceedingConference PaperResearchpeer-review

    Original languageEnglish
    Title of host publicationMechanical and Aerospace Engineering
    EditorsWu Fan
    Place of PublicationStafa-Zurch Switzerland
    PublisherTrans Tech Publications
    Pages3127 - 3131
    Number of pages5
    Volume110-116
    ISBN (Print)9783037852620
    DOIs
    Publication statusPublished - 2012
    EventInternational Conference on Mechanical and Aerospace Engineering (ICMAE) - Bangkok Thailand, Stafa-Zurch Switzerland
    Duration: 1 Jan 2012 → …

    Conference

    ConferenceInternational Conference on Mechanical and Aerospace Engineering (ICMAE)
    CityStafa-Zurch Switzerland
    Period1/01/12 → …

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